Pfeiffer Vacuum GmbH

Take your semiconductor manufacturing to new heights with our HiPace 3400 IT, the most compact and powerful turbopump designed exclusively for your demanding ionimplantation applications.

Compact with superior pump performance
The HiPace 3400 IT sets the standard as the most compact turbopump in its class, ensuring optimal space utilization without compromising performance. The DN 320 flange size increases the pumping capacity for process gases up to an impressive 30 %.

Process protection for extended uptime
The unique bearing concept and specially coated rotor design protect both your process and the pump, providing unparalleled durability and reliability. Our proven pump design, coupled with an intelligent temperature management system, provides extended uptime and extended maintenance intervals. Keep your process running smoothly without unnecessary interruptions.

Superior performance, fast testing
The ASM 390 and ASM 392 are the perfect leak detection solutions adapted to the semiconductor and display industries as well as to other demanding applications where rapid pump down and high sensitivity is key. Both models are fully
Semi S2 compliant.
These leak detectors are fitted with a dry frictionless backing pump and a powerful high vacuum pump, making them the ideal tools for leak testing of various components in clean environments. Equipped with an additional turbopump, the
ASM 392 will speed up your leak detection process to reduce the downtime of your production equipment.

Robust, accurate and reliable
The ASM 390 and ASM 392 were developed to provide full confidence in leak testing regardless of the operator’s knowledge. They deliver premium performances and accurate results in a minimal time, making them highly efficient in the
field.

Ergonomic and highly maneuverable
ASM 390 and ASM 392 share the same platform and are uniquely ergonomic with a convenient size and height, a secondary handle in the front, a fully rotatable, removable display, an inlet in the front for easy connection to test ports
and unrivaled maneuverability for access to all testing areas, even in tight spaces.

Smart and user-friendly
Thanks to a wide, clear color touch display panel, an integrated toolbox with modular compartments and storage space for vacuum bellows, you will be amazed how easy leak detection can be when you have all necessary accessories at
the point of use.

Electric actuation: Optimal control and durability
The Series E valve line features an electric actuation system designed for total control and high performance. This system includes a fail-safe mechanism so the valve can return to the desired position upon loss of power. It also includes the ability
to put the valve in “local mode”, enabling the user to manually operate the valve as needed when servicing their vacuum system.

Energy efficiency and cost savings:
Driving sustainability Series E is engineered for low power consumption, significantly reducing operational energy costs. This efficiency stems from its innovative motor-controlled electric actuation system, designed to consume far less energy than traditional pneumatic or hydraulic systems. By optimizing energy use, this angle valve not only lowers electricity expenses but also  reduces its environmental impact, supporting eco-friendly practices.

Unmatched reliability
In the world of vacuum technology, the reliability of angle valves is paramount, not only impacting operational efficiency but also offering a significant competitive advantage. Pfeiffer Vacuum’s Series E electric angle valves stand at the
forefront of this field, meticulously engineered to meet the demanding requirements of vacuum applications ranging from atmosphere to 10-9 mbar. This innovative line of electric angle valves delivers unparalleled quality at competitive
prices, becoming an essential tool for industries that demand precise vacuum control.