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Micro System Integration Center, Tohoku University

519-1176 Aramaki-Aza-Aoba, Aoba-ku
J. Nishizawa Research Center, Tohoku Univ.
Sendai,  Miyagi  980-0845

Japan
http://www.mu-sic.tohoku.ac.jp/index_e.html
  • Booth: C2305


We offer R&D support service for micro system technology.

Micro System Integration Center (µSIC) is a core center at Tohoku University that promotes research and development of MEMS/microsystem manufacturing and fusion technology through collaboration with industry and inside the university.

Within the Research and Development Division we are working on a wide range of topics, from materials to devices, systems, processing technology and metrology, in collaboration with laboratories of various research fields within the university. We also accept engineers from the private sector and support research, development and industrialization of MEMS/microsystems through industry-academia collaboration.

In Open Collaboration Division we utilize the 1,800 m2 clean room of the Junichi Nishizawa Memorial Research Center at Tohoku University to operate the “Hands-on-access Fabrication Facility”, the largest open facility for microfabrication in Japan.


 Products

  • Hands-on-access Fabrication Facility
    We offer over 150 MEMS prototype tools. Users pay per use. Companies can send engineers and students, cutting costs. Expert support and training are available. Since 2010, over 300 companies and 60 universities have used it....

  • At the Hands-on-access Fabrication Facility, more than 150 equipment related to prototype development of various devices centering on MEMS are open to companies and universities to support their research and development activities and practical application. Users can use the equipment they need when they need it (charges are based on the equipment used and time). And companies and laboratories that do not have appropriate prototype development facilities dispatch engineers and students to create prototypes themselves. It reduces risks and costs. You can use the know-how accumulated at Tohoku University, and full-time staff will provide maximum support for device design, process design, equipment operation, etc. It is also possible to train engineers with actual development experience during prototype development. In the Hands-on-access Fabrication Facility, companies can also manufacture products under certain conditions. Since its start in 2010, it has been used by over 300 companies, and over 60 universities / public research institutes.  To facilitate rapid prototyping of systems and test environments for microsystems the Prototype Lab. was established at the Hands-on-access Fab. In addition to machine tools such as 3D printers and cutting machines, more than 100 equipment related to electric assembly, mechanical assembly and evaluation can be used on an hourly basis in a 300m2 floor space. We also support prototyping of high-performance hardware that combines micro devices, such as semiconductor chips and sensors, with power supply and wireless communication functions. The lab provides the environment for system development and assembly, and to demonstrate the potential towards industrial products of micro devices/systems under development. Anyone can use it by registering to the Hands-on-access Fab. The usage will be supported by experienced staff.

  • Acupoint stimulation device (health care)
    We are developing a device that uses convergent ultrasound for acupuncture point stimulation....

  • In acupuncture and moxibustion treatment, acupuncture point stimulation is widely used. However, conventional stimulation methods using acupuncture and moxibustion do not allow for continuous or intermittent acupuncture point stimulation in daily life. We are developing a device that uses convergent ultrasound for acupuncture point stimulation. Since ultrasound can stimulate acupuncture points non-invasively, we expect that there will be no infection or pain during needle insertion. Because of the small size of the stimulating part, the device can be attached to the body for daily stimulation, and the intensity and pattern of stimulation can be set freely by setting the applied voltage and driving pattern.


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