DAIFUKU CO, LTD.

Komakihara 4-103
Komaki, Aichi 485-8653

Japan
http://www.daifuku.com

Booth: C2134

Visit us to immerse yourself in the world of advanced AHMS!

＜About us＞

Daifuku is a leading global manufacturer of material handling systems, renowned for its extensive experience across a wide array of industries. Our technology, expertise, and system construction capabilities are highly esteemed by customers worldwide. In the semiconductor manufacturing sector, Daifuku has consistently provided the world's top semiconductor manufacturers with Automated Material Handling Systems (AMHS), which are crucial for cleanroom automation. Daifuku's AMHSs were the first in the world to achieve low particle emission, low vibration, and high reliability through non-contact power supply system. Furthermore, our unique technologies, such as nitrogen purging, address the demands for shrinking the size of semiconductors, significantly contributing to the production of cutting-edge products.

Press Releases

Improving Reliability and Productivity with Daifuku’s Semiconductor Production Line Systems (20240919)

When it comes to semiconductor manufacturing, highly reliable transport and storage systems capable of operating 24 hours a day, 365 days a year are essential. We spoke with engineering and design staff representatives from Daifuku’s Cleanroom Division about Daifuku’s semiconductor production line systems such as the Cleanway, a cleanroom transport system for maximizing equipment uptime, and a nitrogen purge storage system that contributes to semiconductor miniaturization.

continued on our website →　https://www.daifuku.com/daifuku-square/article/000999/

Products

Overhead Hoist Transport (OHT)

An unmanned transport system composed of rails and vehicles, that is normally suspended from the ceiling. There are multiple variations to suit ones specific needs. OHT is the industry general term, with the Daifuku version being the Cleanway Series.... More Info Less Info

Our conventional vehicle model transports carries such as FOUPs, containing 300 mm wafers through the Front end manufacturing process. A separate larger variation can transport panel level packaging, up to 600 x 600 mm, for the Back end of the manufacturing process.

Stocker (STK)

A storage device to store carriers on a temporary basis. Several types exist to support most types of carriers used in the Front and Back end processes. STK is the industry general term, with the Daifuku product lineup being the Clean Stocker Series.... More Info Less Info

Our conventional model stores carriers called FOUPs containing 300 mm wafers for the Front end manufacturing process. A separate model allows the storage of FOUPs for panel level packaging, up to 600 x 600 mm, for the Back end manufacturing process. A nitrogen purging function is available to prevent oxidation of the wafers/panels in the carrier.

Zero Footprint Storage (ZFS)/OverHead Buffer (OHB)

A shelf attached under or beside the OHT rails to store a carrier temporarily. Generally, multiple are installed in clusters along the rails. Daifuk's product lineup consists of the ZFS (Zero Footprint Storage) and STB (Side Track Buffer) solutions.... More Info Less Info

Similar to our stocker solutions, our conventional models store carriers called FOUPs, which contain the 300 mm wafers for the Front end manufacturing process. A separate model allows the storage of FOUPs for panel level packaging, up to 600 x 600 mm, for the Back end manufacturing process. A nitrogen function is available to prevent oxidation of the wafers/panels in the carrier.

Tower Lifter

An elevator to transport carriers between diferent floors. The Daifuku's product lineup is the Zip Tower Series.... More Info Less Info

Used in fabs composed of multiple floors where AMHS is required to transport carriers in between floors quickly.

Material Handling Control System (MCS)

An advanced application that manages the AMHS system, designating transfer instructions and ensuring smooth transport and delivery of carriers. MCS is the general term with Daifuku's product being xMCS.... More Info Less Info

Located just below the MES (Manufacturing Execution System), xMCS relegates various jobs to the corresponding OHT/STK based on instructions from the MES. Ensures the most efficient and quickest possible delivery, while reporting the necessary information back to the MES. High performance, with over 99% uptime dependent on system configuration.

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