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LNEYA Thermo Refrigeration Co.,Ltd.

55 Hanlin Road, Ehu Town, Xishan District, Wuxi City, Jiangsu Province, China
Wuxi,  Jiangsu 
China
https://www.lneya-online.com/
  • Booth: EWE201

LNEYA focused on the research, design and production of semiconductor temperature control devices Chiller. The product temperature control range is from -100℃ to +90℃, with a temperature control accuracy of up to ±0.05℃. It supports multi-channel independent temperature control. Each channel has a separate temperature control range, cooling and heating capacity, and heat transfer medium flow, etc. It is mainly used for precise control of reaction chamber temperature in semiconductor processes.
Welcome to the LNEYA booth, booth number L2900, to learn more about our Chillers!


Discover more on https://www.lneya-online.com/


 Press Releases

  • Website: https://www.lneya-online.com/

    Semiconductor chip high and low temperature test is a necessary test equipment for metal, components, electronics and other material industries. It is used to test the degree of material structure or composite material that can be endured in a continuous environment of high temperature and low temperature in a short time. The chemical change or physical damage caused by thermal expansion and contraction of the internal test sample.
    The high and low temperature test of semiconductor chips has simple and convenient operation performance and reliable equipment performance. Physical changes in defense industry, aerospace, BGA, PCB base, electronic chip IC, semiconductor ceramics and polymer materials.

    Special attention should be paid to the high and low temperature test of semiconductor chips. The high and low temperature test of semiconductor chips cannot be easily opened during use. The main reasons are as follows:

    The semiconductor chip high and low temperature test is a test box that simulates the environment. During use, there may be various extreme environments in the test box, such as low temperature, high temperature and high pressure, high temperature and high humidity and other special conditions.

    If a low temperature test of -70°C is being performed in the test box, open the door of the test box at this time, and the cold air flow will overflow the test box. If our fingers touch the samples on the wall of the test box without any protection, they will be frozen instantly. , the muscle tissue at the frostbitten site may even necrosis. In addition, opening the door of the test chamber at a lower temperature may cause frost on the evaporator, which will affect the cooling speed, and may even cause problems such as damage to the compressor.

    If the door of the test chamber is opened during a test at a high temperature of 150°C in the test chamber, the high-temperature gas will burst out of the test chamber in an instant. Combustibles may even cause a fire.

    If it is other environmental test equipment, such as the constant temperature and humidity test chamber in the high temperature and high humidity test chamber, the pressure and steam in the instrument will be very large. If the door of the test chamber is opened at this time, there will also be high temperature and high humidity steam. Running out of the test chamber is also more likely to cause serious burns to the operator.

    Therefore, in the middle of the high and low temperature test of the semiconductor chip, if it is not necessary to open the door of the test box, do not open the door of the test line. Open the test chamber door.

  • Website: https://www.lneya-online.com/

    The accurate selection of the semiconductor test chiller needs to meet 6 conditions. When we need to buy a semiconductor test chiller, choosing a large one will waste material resources, and choosing a small one will not achieve the cooling effect, so how can we accurately select the semiconductor test chiller machine?

    The demand for semiconductor test chillers varies by industry. When selecting the type of the semiconductor test chiller, we can select the type according to the following points.

    1. Temperature range: When selecting a semiconductor test chiller, the factory’s requirements for refrigeration temperature should be considered first. The level of refrigeration temperature has important practical significance for the selection and system composition of the semiconductor test chiller. For example, a semiconductor test chiller for air conditioning and a semiconductor test chiller for cryogenic engineering often have fundamental differences.

    2. Refrigeration and stand-alone cooling capacity: The cooling capacity of the semiconductor test chiller is directly related to the energy consumption and operation effect of the entire unit, especially when designing a cold station, under normal circumstances, there is no single semiconductor test chiller. The main reason is to consider that when a semiconductor test chiller breaks down or shuts down for maintenance, it will not stop production, but should select a reasonable number of units according to the production situation.

    3. Energy consumption: refers to electricity consumption and steam consumption. Especially when choosing a large-scale semiconductor test chiller, the comprehensive utilization of energy should be considered. Because a large-scale semiconductor test chiller is a device that consumes a lot of energy, for large-scale refrigeration stations for cooling, it should be fully considered. Comprehensive utilization and balance of heat and cold, with special attention to the full utilization of waste steam and waste heat, in order to achieve results.

    4. Vibration will occur during operation, but the frequency and amplitude vary greatly due to different types of units. If there is a requirement for anti-vibration, a semiconductor test chiller with a smaller amplitude should be used, or the foundation and pipeline of the semiconductor test chiller should be damped.

    5. The quality of the cooling water has a great influence on the heat exchanger, and its effect on the equipment is fouling and corrosion, which will not only affect the reduction of the cooling capacity of the semiconductor test chiller, but also lead to heat exchange in severe cases. Tubes are clogged and broken.

    There are many kinds of refrigeration equipment in daily use, but the application range of semiconductor test chiller is relatively wide, it can control the temperature within a specific range, and the refrigeration effect is stable, suitable for use in various industries.

    We are a professional manufacturer of temperature control equipment, supporting customized services, please consult us for details!

  • Website: https://www.lneya-online.com/

    Semiconductor temperature control technology is an important technical means that can achieve precise temperature control of semiconductor devices. Through the combination of passive and active temperature control, the temperature control needs of different fields can be met. With the continuous advancement of science and technology, semiconductor temperature control technology will play an important role in more fields and promote the development of related industries.

    Our temperature control equipment ensures highly accurate and constant temperatures in the manufacturing process of electronic components and semiconductors. In the demanding production processes for the ever-shrinking microcircuits, reproducible temperatures are an essential factor for consistent manufacturing quality. In the fields of semiconductors and electronics, our temperature control units are used, for example, for the temperature control of etching baths for the wet-chemical production of wafers and microchips. Other applications include metal organic vapor deposition (MOCVD) in semiconductor deposition and temperature-dependent functional and material testing of electrical and electronic components and functional assemblies using non-conductive thermofluids such as Galden or FC77.

    Applications of Semiconductor Cooling Chillers

    •  Electrochemical Thermcells
    •  Electronic Products
    •  Microchips
    •  Optoelectronic Devices
    •  Process Cooling
    •  Silicon Wafer Manufacturing
    •  Wet Chemical Etching Baths

  • Website: https://www.lneya-online.com/

    The wafer testing temperature control system is a key equipment used in semiconductor production to accurately control the wafer temperature to ensure product quality and performance. It consists of a temperature control device, a temperature sensor, a control algorithm and data acquisition, and will face higher precision and accuracy in the future. Stability challenges.

    Principle and composition of semiconductor wafer testing temperature control system
    The basic principle of the wafer testing temperature control system is to ensure that the wafer is in a constant temperature state during the semiconductor testing process through precise temperature control and stability. The temperature of the wafer has an important impact on the performance and reliability of semiconductor devices. Therefore, testing the stability and accuracy of the temperature control system is very critical. The system usually consists of the following parts:

    1. Temperature control device: Responsible for providing the required temperature control.

    2. Temperature sensor: monitor temperature changes in real time.

    3. Control algorithm: Adjust according to the monitored temperature changes to maintain the set temperature.

    4. Data collection: Collect temperature data for analysis and recording.

    Application fields of semiconductor wafer testing temperature control system

    1. Semiconductor production: Functional and reliability testing of chips.

    2. Semiconductor packaging: testing and evaluating packaging materials.

    3. R&D and education: testing and verification of new materials and new processes.

  • Website: https://www.lneya-online.com/

    A semiconductor chip chiller is a device that uses the electrical properties of semiconductor materials to achieve refrigeration. By adding current to the semiconductor chip, it generates a temperature difference under the action of the thermoelectric effect and transfers heat from one side to the other, thereby achieving refrigeration. the goal of.

    Semiconductor chip chiller is mainly composed of refrigeration system, circulation system, control system, box, etc. The refrigeration system adopts vapor compression refrigeration. The circulation system includes a circulation pump, cold storage container, exhaust valve, one-way valve, thermal resistor, pipeline, etc. The control system adopts PID control technology, high-definition LCD display, and has multiple protection functions to ensure the safe operation of the equipment. Through the cooling and heating of the unit itself, the heat-carrying fluid is transported to the outside world to meet the requirements of process conditions.

    Semiconductor Chip Chiller

    Features of semiconductor chip chiller:

    1. High-efficiency heat exchange system: Plate heat exchanger is used for refrigeration, which has high heat exchange efficiency and compact structure.

    2. Repeatability of control results: Based on the advanced dynamic control system, consistent control results can be achieved every time, greatly improving the stability of product production.

    3. Fully closed system: It adopts a fully closed system design. The entire circulation pipeline only has a breathing hole left on the liquid filling cap. The cooling medium will not be in direct contact with the air, which prolongs the service life of the medium and ensures the stability of the system operation. .

    4. Product appearance: It adopts large-diameter quartz glass liquid level gauge. The liquid level gauge and the operation screen are placed on the same side, which is convenient for observation. The style is simple and fashionable, and the proportions are coordinated.

    5. Quality assurance: All key components are imported brands to ensure long-term reliable operation of the product. At the same time, all products undergo strict testing and inspection before shipment to ensure that there will be no problems with the equipment when it arrives at the customer's site.


 Products

  • Semiconducto Chillers
    The temperature control range of the semiconductor chiller is from -100℃ to +90℃, with a temperature control accuracy of up to ±0.05℃, and supports multi-channel independent temperature control....

  • Website: https://www.lneya-online.com/

    FLT Series

    The semiconductor temperature control system chiller is mainly used for precise temperature control in the semiconductor production process and testing process. It is specially developed and designed for the semiconductor industry.

    Temperature range  +5°C ~ +40°C  -25°C ~ +40°C  -45°C ~ +40°C  -80°C ~ +80°C  -100°C ~ +80°C
    Cooling Capacity 6 ~ 40kW 2 ~ 15kW 1 ~ 8kW 0.6 ~ 3kW 1.5 ~ 3kW
    Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

    FLT Multi Channel Temp Contol

    Multi channel independent temperature control, which can have a separate temperature range, cooling and heating capacity, thermal conductivity medium flow rate, etc., adopts two independent systems. According to the required temperature range, steam compression refrigeration or ETCU non compressor heat exchange system can be selected. The system can be used for universal expansion tanks, condensers, cooling water systems, etc., which can effectively reduce equipment size and operation steps.

    Temperature range -20°C ~ +90°C -45°C ~ +80°C -10°C ~ +80°C -20°C ~ +100°C
    Cooling Capacity 4kW 5 ~ 13kW 3 ~ 6kW 8 ~ 15kW
    Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

    FLTZ Series Frequency Conversion

    Double frequency conversion series temperature control system, circulation pump and compressor are all adjusted by frequency conversion.

    Temperature range  -30°C ~ +40°C
    Cooling Capacity 5 ~ 11kW
    Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized
  • Temperature Forcing Systems
    Provides accurate and fast ambient temperature (-120 °C ~ +300 °C) for chips, modules, integrated circuit boards, and electronic components...

  • Website: https://www.lneya-online.com/

    This product is suitable for precise temperature control of electronic components. In the manufacture of semiconductor electronic components for harsh environments, the IC packaging assembly and engineering and production testing phases include electronic thermal testing and other environmental testing simulations at temperatures. Once put into practical use, these semiconductor devices and electronic products can be exposed to extreme environmental conditions to meet demanding military and telecommunications reliability standards.

    Model AES-4535 AES-6035 AES-8035 AES-A1035W AES-A1235W
    AES-4535W AES-6035W AES-8035W
    Temp. Range -45℃~225℃ -60℃~225℃ -80℃~225℃ -100℃~225℃ -120℃~225℃
    Temp. Control Accuracy ±0.5
    Temp. Conversion Time -25℃ to 150℃ Approximately 10S -45℃ to 150℃ Approximately 10S -55℃ to 150℃ Approximately 10S -70℃ to 150℃ Approximately 10S -80℃ to 150℃ Approximately 11S
    150℃ to -25℃ 150℃to -45℃ 150℃to -55℃ 150 ℃to -70℃ 150℃to -80℃
    Approximately 20s Approximately 20s Approximately 15s Approximately 20s Approximately 20s
    Air Requirement Air Cleaner<5um
    Air Oil Content:<0.1ppm
    Air Temp&Humidity:5℃~32℃ 0~50%RH
    Air Handing Capacity 7m3/h ~ 25m3/h Pressure 5bar~7.6bar
    System Pressure Dispiay Pressure of Refrigeration system is realized by pressure gauge (High pressure, low pressure);
    Pressure of circulatory system is detected by pressure sensor and displayed on touch screen.
    Controller Siemens PLC, Fuzzy PID Control algorithm.
    Temp. Control Control of outlet temperature
    Programmable 10 procedures can be developed, and each program can be composed of 10 steps
    Communicating Protocol Ethernet Interface TCP/IP Protocol.
    Internal Temp. Feedback Equipment outlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (water cooling equipment is configured) .
    Temp. Feedback T Temperature Sensor
    Compression Engine Tecumseh / Emerson Tecumseh / Emerson Tecumseh / Emerson Tecumseh / Emerson Tecumseh / Emerson
    Evaporimeter Double-pipe (heat) Exchanger
    Calorifier Flanged Barrel Heater
    Refrigeration Accessory Danfoss / Emerson fittings (dry filters, oil separators, high and low pressure protectors, expansion valves, solenoid valves).
    Operation Panel LNEYA custom 7-inch color touch screen, temperature curve display\ EXCEL data export.
    Safe Guarding With self-diagnosis function; phase sequence phase breaker, freezer overload protection; high-voltage pressure switch, overload relay, thermal protection device and other safety protection functions.
    Cryogen Topsubmixed Refrigerant
    External Insulation Hose 8m DN32 fast coupling clamp for easy outgoing insulation hose
    Shape Dimension (Wind)cm 54*69*132 54*69*132 75*73*133 80*120*185 100*150*185
    Shape Size (Water)cm 54*69*132 54*69*132 75*73*133 70*100*175 80*120*185
    Air-Cooled Type Copper tube aluminum fin condensation mode, upper and out type, condensing fan using Germany EBM axial flow fan.
    Water-Cooled Type W Type W is water cooled
    Water-Cooled Condenser Sleeve type heat exchanger (Paris/ Shen's)
    Cooling Water Quantity At 25℃ 0.6m3/h 1.2m3/h 1.6m3/h 2.6m3/h 3m3/h
    Source 380V 50HZ 3.7kW max 5kW max 5kW max 6.8kW max 7.5kW max
    Source Customizable 460V 60HZN 220V 60HZ three-phase
    Shell Material Cold rolled sheet spray (Standard Colour 7035).
    Temp. Spread High Temperature To +300℃
  • Thermal Chucks
    This product can realize rapid temperature change and precisely control temperature....

  • Website: https://www.lneya-online.com/

    The system provides an open flat surface working platform, rapid temperature rise and fall, and constant temperature control, which can be used for testing RF devices and high-density power devices (IGBTs and MOSFETs), and can also be used for rapid cooling of laboratory flat panels (plasma, biological products, batteries) etc.

    Model MD-708 MD-712 MDL-708
    Temp range -75℃~225℃ -75℃~225℃  -75℃~225℃
    Temp accuracy ±0.1℃ ±0.1℃ ±0.1℃
    Plate Temperature Uniformity ±1℃ ±1℃ ±1℃
    flatness ±50um ±50um ±50um
    Size diameter200mm diameter300mm 150mm*200mm
    host and card cable 2.5m or custom
    surface treatment Electroplated nickel (optional gold plating)
    heat up -60°C to +25°C: 2 min
    0°C to +25°C: 2 min
    +25°C to +220°C: 6 min
    cool down 220°C to +25°C: 2 min
    +25°C to -60°C: 6 min
    Control System PLC controller, heating feed-forward PID fuzzy algorithm, cooling electronic expansion valve PID adjustment control cooling capacity
    display and record 7-inch color touch screen, record temperature curve
    communication Ethernet interface TCP/IP protocol
    Refrigeration Compressors Tecumseh
    power supply 220V 50/60HZ 2.8KW 220V 50/60HZ 4.5KW 220V 50/60HZ 2.8KW
    Host size mm 550×650×370 550×650×370 550×650×370
  • Recirculating Air Temp Control System
    It is widely used in high and low temperature testing of semiconductor equipment....

  • Website: https://www.lneya-online.com/

    1. It is widely used in high and low temperature testing of semiconductor equipment. Cold and heat sources for high temperature and low temperature constant temperature test of electronic equipment;

    2. Independent refrigeration cycle fan unit;

    3. It can work continuously for a long time and defrost automatically. The defrosting process does not affect the storage temperature;

    4. Modular design, easy replacement of standby unit (if there are 10 units, only one standby unit can be used);

    5. Solve the problem of frequent door opening and closing and frosting of evaporation system; The defrosting process of the evaporation system has no influence.

    6. It is simple to build a set of high and low temperature constant temperature chamber transformer (according to the drawings provided, the box shall be spliced like building blocks, the electricity and water shall be connected, and the work can be started after the temperature is set).

    Model AI-635/635W AI-835W AI-1055W
    Temperature range -65℃~125℃ -85℃~125℃  -105℃~125℃
    Control mode PID Adaptive controller
    Communication protocol RS485 Interface,Modbus RTU Protocol
    Temperature feedback PT100
    Operation panel 7-inch color touch screen controller, temperature curve record, data export to EXCEL format.
    Temp. accuracy ±0.2℃
    Heating power 3.5kW 3.5kW 3.5kW
    Cooling
    capacity
    125℃ 3.5kW 3.5kW 3.5kW
    50℃ 3.5kW 3.5kW 3.5kW
    20℃ 3.5kW 3.5kW 3.5kW
    0℃ 3.5kW 3.5kW 3.5kW
    -20℃ 3kW 3.5kW 3.5kW
    -40℃ 2.1kW 2.5kW 3.5kW
     -60℃ 1kW 2.1kW 3kW
     -75℃ 1kW 2kW
     -95℃ 1kW
    Circulating air flow 550m3/h 550m3/h 550m3/h
    Compressor Emerson
    Safety protection Self-diagnosis function;freezer overload protection;high pressure switch,overload relay,thermal protection device,liquid low level protection,high temp. protection and temp. fault protection
    Defrosting device There are installed defrosting device and condensate drain inside
    Timing on&off operation Can set a key time for starting up & stop
    Refrigerant R404A R23 R404A R508B R404A R23 R14
    Water-cooled type
    (cooling water at 20℃)
    1200L/H 1600L/H 2600L/H
    1.5bar~4bar 1.5bar~4bar 1.5bar~4bar
    Dimension (cm) 55*100*175 55*100*175 70*100*175
    Weight 280kg 300kg 360kg
    Power AC 380V 50HZ AC380V50HZ AC380V50HZ
    7kW 7.3kW 9.5kW
    Optional High Temperature -65℃ ~ 165℃, -85℃ ~ 165℃
  • Direct Cooled Semiconductor Chillers
    The refrigerant in the refrigeration system is directly output and evaporated into the target control element (heat exchanger) for heat exchange, thereby cooling the target control object....

  • Website: https://www.lneya-online.com/

    ZLJ / SLJ Series

    It is suitable for places where the heat exchange area of the heat exchanger is small but the heat exchange capacity is large. It can also be used for gas capture, the refrigerant is directly passed into the trap to evaporate, and the gas in the space is quickly captured through the condensation effect on the surface of the trap.

    Temperature range  -40°C ~ -15°C  -80°C ~ -50°C  -150°C ~ -110°C
    Cooling Capacity 0.5 ~ 4kW 0.37 ~ 3.1kW 2.5 ~ 9kW
    ZLJ Series SLJ Series
    Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized
  • Waste Gas Condensation Recovery Device
    The gas heat exchange system has a pressure resistance of 8bar, and a heat exchange cold box with a pressure resistance of 25bar can be customized...

  • Website: https://www.lneya-online.com/

    Applied to gas condensation liquefaction recovery. The exhaust gas or other electronic gases are connected to the equipment through the induced draft fan (vacuum pump), liquefied, collected and separated into the collection tank by lowering the temperature, and other gases are discharged, so as to realize the condensation, capture and recovery of the gas.

    Model YQH-3520EXd YQH-7520EXd YQH-3530EXd YQH-7530EXd
    YQH-3520Wexd YQH-7520WEXd YQH-3530WEXd YQH-7530WEXd
    gas flow 20m3/h 20m3/h 30m3/h 30m3/h
    lowest temperature -35℃ -75℃ -35℃ -75℃
    first stage temperature 0℃ 0℃ 0℃ 0℃
    Cold box under pressure 8bar 8bar 8bar 8bar
    heat transfer area 3m2*2 3m2*2 5m2*2 5m2*2
    Heat exchanger material SUS304 SUS304 SUS304 SUS304
    pressure monitoring Anti-icing blocking pressure monitoring and protection at the inlet and outlet of primary and secondary evaporation traps
    defrost control Defrost control can be carried out according to pressure monitoring
    Gas outlet diameter DN40 PN16 DN40 PN16 DN50 PN16 DN50 PN16
    Recovery fluid storage tank 10L can be optionally installed with recovery transfer pump 15L can be optionally installed with recovery transfer pump
    Drain diameter G1/2 G1/2 G1/2 G1/2
    Control System Siemens PLC
    display and record 7 inch color touch screen
    compressor Emerson Copeland Scroll Flexible Compressor (explosion-proof is epoxy resin packaged)
    Power supply 380V 50HZ MAX 3.5KW 5KW 4KW 6KW
    size 800*1200*1850 800*1200*1850 1000*1500*1850 1000*1500*1850
    Cooling water (water cooling equipment) 20°C 1800L/H  1BAR~4BAR  G3/4 3000L/H  1BAR~4BAR  G3/4

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