Fastmicro BV

The Fastmicro Particle Defect Inspection System Applications

PDS can be used for particle measurements on:

• Replace multiple legacy systems for one; save floorspace
• Top- and bottom-side inspection without flipping
• 4 / 6 / 8/ 12-inch Si, SiC, GaN, Glass, Sapphire and Compound Wafers (backside, blanks, bevels)
• For photomask: pellicles, reticles (front and backside)
• 3Di Advanced Packaging (e.g. hybrid bonding)
• No moving parts: clean and robust
• Pre-scan to accelerate workflow for further particle analysis
• Manual and Automated up to 12-inch wafers
• High Purity Critical parts

Particle Counting

The Fastmicro Sample Scanner is an inspection tool for indirect measurement of surface particle contamination down to 0.5 micrometer particles using innovative 'tape-lift' samplers. These samplers or PMC cards facilitate flexible sampling on a variety of surfaces, including those that are difficult to reach or are unusually rough, without leaving any measurable residue. Quick and efficient, the scanner analyzes samples within seconds over a sample area of 225 mm², ensuring immediate and accurate results.

The versatility of the Sample Scanner is enhanced with different sampler options, including the card sampler holder for indirect measurements and the 1” wafer holder for fallout measurements. This adaptability makes it suitable to test diverse situations across various industries, providing robust measurements and valuable insights into contamination levels.

Fallout Scanner for particle deposition rate monitoring

The Fastmicro Fallout Scanner has been developed to measure the particle deposition rate in any industry. It can be used in both vacuum as well as ambient environments.

The scanner module is also available as a white label solution for system integrators. 

Continuously measure where and when it matters.

The Fastmicro Fallout Scanner offers particle deposition rate monitoring with intervals in seconds. 

The particle deposition rate can be accurately measured starting at particles of just  0.5 µm. 

Combined with the easy to use software, we help our customers to view cleanliness measurements on surfaces instead of airborne-only. Not all particles remain airborne, as they could deposit on critical surfaces, impacting technical cleanliness. 

With the Particle Fallout Scanner, the actual deposition rate becomes clear and can be used for further cleanliness improvement.