Your partner for treating your process pollutants.
Dürr provides concentrators, scrubbers, carbon adsorption solvent recovery, separation, and purification technologies along with oxidation as needed. Dürr analyzes your process and selects the best technologies for your emission composition, backed by a global in-house service and replacement parts organization to support your maintenance needs.
Carbon adsorption systems, both regenerative and non-regenerative, capture vapor-phase emissions of volatile organic compound (VOC) solvents from solvent-based processes. The solvents are prevented from entering the atmosphere, to ensure compliance with environmental laws and regulations.
Recent Dürr projects in semiconductor chip production exhaust emissions controls include:
- Highly efficient vertical scrubbers for acids
- Selective catalytic reduction (SCR) systems for NOx
- VOC concentrator with electric heated oxidizer
- Heat recovery methods for concentrator regeneration
- Recuperative thermal oxidizer design for easy clean-out of silicone build-up
- Solvent recovery systems