TAIYO NIPPON SANSO CORPORATION
Originally founded in 1910, Taiyo Nippon Sanso, part of Nippon Sanso Holdings and Mitsubishi Chemical Group, is one of the world’s largest industrial gas technology and solution providers that contributes to the growth of a wide range of industries and the resolution of social challenges by fully utilizing the potential of gas innovations.
In 1983, TNSC launched MOCVD operations alongside its conventional industrial gas operations, were developed based on the company's gas-handling technologies and ultra-high vacuum technologies proven over the years, and are coherently manufactured with its original techniques. Wide range Line-up for R&D and mass-production for GaN, and GaAs/InP as well as Ga2O3. Our reactor is horizontal based reactor with some key technologies (multiple gas flow, wide process window, temperature controllability) and gives high performance epitaxial layers. Increasing its reliability and effectiveness by responding to the sophisticated semiconductor manufacturing product with the most up-to-date techniques.