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PTW Europa GmbH

Maria-Reiche-Str. 1
Dresden,  Saxony  01109

Germany
https://ptwgroup.com/
  • Booth: B1120


INNOVATIVE SOLUTIONS FOR SEMICONDUCTOR MANUFACTURING

PTW Group
Innovative Solutions for Semiconductor Manufacturing

Innovative Solutions to Improve Sustainability

  • Reduce water consumption
  • Reduce chemistry consumption
  • Reduce power consumption
  • Reduce waste

With Our Products

  • Innospray nozzle
  • SpinTec spin etchers
  • Electronics exchange/ repair program
  • Innovative chillers

Range of Services

Legacy Tool Support

  • Spare parts (OEM new, repaired or refurbished)
  • Replacement for discontinued parts
  • Upgrades and exchange parts program

Customer Service

  • Corrective maintenance
  • Preventive maintenance

New Tool Development

  • Developing new tools with the goal to reuse qualified recipes or to address challenges of the future

Tool Trading

  • Buy and sell "As is, where is"
  • Bulk buy
  • Target purchases

OEM Representation

  • Sales and marketing
  • Warranty and service support
  • Spare parts management

 Products

  • Hitachi SEM
    Comprehensive service and refurbishment solutions for CD-SEM, FE-SEM and Hi-SEM tools...

    • Tool Types

    CD-SEM

    • 7, 8 & 9-series
    • CG 4000
       

    FE-SEM

    • S 4-series
    • S5000 & 5500
    • SU8000 & 8200
       

    Hi-SEM

    • TM 1000 & 3000/30
    • S 2700 & S 3-series
    • SU1510 & 3500
       

    Expertise

    • Tool refurbishment
    • Installation, tool move & training
    • Corrective & preventive maintenance
    • Spare parts
       

    Parts: Repair/Refurbishment

    • Controller
    • Robot and handling
    • Evac system
    • Stage
    • Electron optics system
       
  • SEZ LAM
    Refurbishment, upgrades, and maintenance for RST, SP, 304/323/4200/4300, and DaVinci tools...

    • Tool Types

    • RST 100, 101, 102, 103
    • SP 200, 201, 203, 223
    • 304, 323, 4200 & 4300
    • DaVinci
       

    Upgrades

    • Improved suck back system
    • Pump upgrade
    • FFU upgrade
    • Chuck brake upgrade
       

    Expertise

    • Tool refurbishment
    • Installation, tool move & training
    • Corrective & preventive maintenance
    • Spare parts
       

    Parts: NEW/Repair/Refurbishment

    • Chucks & chuck repair
    • Eco gripper & flip modules
    • Bernoulli gripper
    • Elevating unit
    • Process chamber
    • New bearing units
    • Chuck brakes
    • PCB
    • End-effector
    • Preflush manifold
    • Labyrinth seal
    • Chuck pins
    • Distance rings
  • ASM
    Refurbishment, upgrades, and maintenance for ASM Furnace, Epitaxy, and XP tools...

    • Tool Types

    • Furnace A400 - A412
    • Epitaxy E2000 E3200
    • XP5 XP8
       

    Upgrades

    • Gear box
    • Add in water leakage sensor
    • Retrofit of TCF/TCU cooling system
    • Zirox O2 analyser
    • Galden coolant upgrade (TCF)
       

    Expertise

    • Tool refubishment
    • Installation, tool move & training
    • Corrective & preventive maintenance
    • Spare parts
       

    Parts: Repair/Refurbishment

    • PCBs, including CPU & Foxboro boards
    • Repair LVC-414 controller
    • Injector
    • Waferwand
    • Compumotor driver
    • Reflector
    • Thermocouple
  • Semitool
    Refurbishment, maintenance, and spare parts for Semitool Raider, Storm, Spectrum, SST, and SAT tools...

    • Tool Types

    • Raider
    • Storm
    • Spectrum
    • SST
    • SAT
       

    Exchange Parts

    • Motors
    • Chamber control block
    • DYNATRONIX power supply
    • PCB boards
       

    Expertise

    • Tool refurbishment
    • Installation, tool move & training
    • Corrective & preventive maintenance
    • Spare parts
       

    Part Repair / Refurbishment

    • Actuator refurbishment
    • Gold boxes
    • DYNATRONIX power supply
    • Lift rotate module
    • Semitool Raider robot
    • Ozone generator refurbishment
  • Robot Overhaul
    Refurbishment, upgrades, and maintenance for ATM & VTM robots, pre-aligners, drive boxes, and controllers...

    • Product Range

    ATM & VTM Robots, Pre-Aligners, Drive Box & Controllers

    ATM

    • PRI
    • Rorze
    • Shinko
    • Yaskawa
    • Kawasaki
    • Brooks
    • Genmark
       

    Cost Savings

    • Long life time
    • 6 months warranty
    • Reduced cost compared with buying new
       

    Expertise

    • Refurbished robot sales
    • Robot refurbishment & repairs
    • Spare parts, parts refurbishment & exchange
    • Robot upgrades
       

    Field Service

    • Corrective & preventive maintenance
    • Installation & de-installation
    • Teaching & fine-tuning
    • Inspection & testing
  • Coater Developer
    Refurbishment, upgrades, and maintenance for Semitool, ATM/VTM robots, coater/developer tools, and SPINTEC single wafer wet etch equipment...

    • Tool Types

    • SÜSS ACS 200 & 300
    • FAIRCHILD FALCON
    • SCREEN
       

    OEM: New and Second Source Parts

    • Motors
    • Chucks and bowls
    • Sensors
    • Media valves
    • SM and Libbert cards
       

    Refurbishments and Repairs

    • Hotplate refurbishment
    • Spinmotor and controller
    • Robots
    • End effectors
    • Complete coater and developer modules
    • Gear unit process arm refurbishment
    • Spin chuck repair
    • Wafertec pump repair
       

Categories

200 Packaging and Assembly Equipment
  • Lithography Systems for Wafer Level Packaging; Bumping; 3D Interconnect Aligners
  • Plating; Electro Chemical Plating for device assembly
    • 203 Inspection & Measurement Products
  • Defect; Particle; Bump; Contamination Detection, Review or Inspection
  • Film Thickness; Thickness; Uniformity Measurement; Ellipsometer
  • Flat; Notch Finding System
  • Microscopes: Atomic Force Microscopes (AFM)
  • Microscopes: Confocal Scanning Microscope; 3-D Video Microscopes
    • 205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 207 Process Equipment
  • Bumping Systems
  • Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
  • Coat; Develop; Resist Processing; Track Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Plating; Electro Chemical Plating; Deposition Systems
  • Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
    • 400 Components, Parts & Accessories
  • Bearings; Shaft Collars
  • Chucks for Wafer and other Substrates

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