Xinxiang Shengda Filtration Technique Co., Ltd.

-316 L stainless steel housing(VIM-VAR or compatible）
-1.5 nm particle removal
-Nickel/316L stainless steel/PTFE filter media available
-Unique sintering manufacturing process with no particle residues
-Manufactured and double bagged in the cleanroom

The 316 stainless steel housing and  perfluoropolymer/nikel/stainless steel filter media help minimize the pressure differential and extend the service life of the products.

-316L stainless steel housing(VIM-VAR or compatible）                                                                                          
-Nickel/316L stainless steel filter media
-Unique sintering manufacturing process with no particle residues
-No obvious welding seam on the surface   
-High temperature and pressure capabilities  
-Easy for assembly and installation. 
-100% helium leak tested   
-Manufactured and packaged in the cleanroom  
-Excellent gas displacement and desorption characteristics
-Double bagged with high purity nitrogen protection

They feature of 316L stainless steel housing and Ni/316L stainless steel filter media, providing terminal process protection,extraordinary corrosion resistance and compatibility with inert gases, hydrides and reactive gases.The surface mount fitting design is fully compatible with IGS, C/W seal configurations, and seamlessly integrates into comprehensive gas delivery systems.

-316L stainless steel construction                                                                                          
-Unique sintering manufacturing process with no particle residues
-Compatible with varieties of semiconductor process gases 
-Low pressure differential    
-No displacement 
-Fits in place of standard  1/2" VCR and ¼"VCR compatible gasket  
-Easy for assembly and installation 
-Manufactured and packaged in the cleanroom 
-Double bagged with high purity nitrogen protection

KET series filters consist of 316L stainless steel. These compact filters are aim to protect components like mass flow controllers, regulators and valves in semiconductor gas distribution systems from particle damage at 400℃ operating temperature.

-316L stainless steel and Ni filter media or compatible                                                                                     
-Unique sintered manufacturing process ensures no particle residues
-Compatible with varieties of semiconductor process gases
-Low pressure differential  
-No displacement
-Fits in place of standard ¼"VCR  ，½" VCR and 3/8"VCR compatible gasket
-Easy for assembly and installation 
-Manufactured and packaged in the cleanroom   
-Double bagged with high purity nitrogen protection

KET Series filters consist of 316L stainless steel and Ni. These compact filters are aim to protect components like mass flow controllers, regulators and valves in semiconductor gas distribution systems at 400℃ operating temperature from particle damage . 

-316L stainless steel construction                                                                                          
-Unique sintered manufacturing process ensures no particle residues
-Compatible with varieties of semiconductor process gases 
-Reducing turbulent flow during venting of process chambers 
-Excellent performance in high pressure at the gas inlet  
-100% helium leak tested   
-Easy for assembly and installation   
-Manufactured and packaged in the cleanroom

DF diffusers consist of standard joint, 316L stainless steel housing and sintering metal filter media. It is ideal for providing uniform flow into the chamber while removing particles in gas flow.

-316L housing(VIM-VAR or compatible）
-Unique sintering manufacturing process with no particle residues
-Compatible with a variety of process gases
-Ideal for bulk gas transportation
-100% helium leak tested
-Manufactured and packaged in the cleanroom
-Double bagged with high purity nitrogen protection

This bulk filter features a high-quality nickel filter core and a durable 316L stainless steel housing, ensuring structural integrity and longevity. Its 1.5-nanometer filtration technology effectively removes tiny particles from gases, providing an ultra-pure environment for semiconductor manufacturing and other high-purity gas transport needs.