AMFLO Fluid Systems & Components Co., Ltd.

The Ultra High Purity (UHP) gas regulator is designed to provide precise control of gas pressure while maintaining the highest level of purity. It is widely used in semiconductor, pharmaceutical, chemical, and analytical industries where contamination-free gas delivery is critical.

Key Features:

Ultra High Purity Construction

• Made from electropolished stainless steel (commonly 316L or 304L) to prevent particle contamination.

• Internal surfaces polished to a low surface roughness (Ra ≤ 0.25 μm) to minimize adsorption and facilitate thorough cleaning.

Leak-Tight Performance

• 100% helium leak tested to ensure hermetic sealing.

• Equipped with metal-to-metal sealing and VCR or similar ultra-high-purity fittings.

Precision Pressure Control

• Accurate outlet pressure adjustment for sensitive applications.

• Typically supports a wide inlet pressure range with stable and repeatable performance.

Compatibility with Multiple Gases

• Suitable for corrosive and inert gases, including hydrogen, nitrogen, argon, oxygen, and specialty gases.

• Compatible with ultra-high-purity gas lines and cleanroom environments.

Cleanroom Assembly and Packaging

• Assembled, tested, and packaged in ISO Class 5 or higher cleanrooms to ensure contamination-free delivery.

• Optional pre-conditioning or flushing with inert gases before shipping.

Safety Features

• Designed to withstand high inlet pressures with overpressure protection.

• Certified for use in hazardous environments, depending on the model.

Applications:

• Semiconductor fabrication (CVD, etching, lithography)

• Analytical laboratories and instrumentation

• High-purity pharmaceutical and chemical gas delivery

• Aerospace and research facilities requiring contamination-free gas

The PTU21 Series Ultra High Purity (UHP) Terminal Gas Control Panel is a precision-engineered solution for high-purity gas distribution and control. Designed for semiconductor, pharmaceutical, chemical, and analytical applications, it ensures contamination-free and leak-tight operation while providing reliable pressure regulation and clear monitoring.

Key Features:

• Equipped with a high-purity single-stage pressure regulator.

• Internal surfaces and flow paths are engineered to prevent particle contamination.

• Ensures stable and accurate pressure control for sensitive gas systems.

Leak-Tight and Tested Performance

• 100% pressure-tested to guarantee operational safety.

• Helium leak-checked to ensure hermetic sealing and zero contamination risk.

• Suitable for ultra-high purity gases, corrosive gases, and high-purity liquids.

Precision Pressure Monitoring

• 2-inch stainless steel pressure gauge with clear, easy-to-read markings.

• Durable construction for long-term stability and accuracy in harsh environments.

Flexible and Secure Installation

• Wall-mounted configuration for space-saving and convenient operation.

• Modular design allows integration into complex gas distribution networks.

Cleanroom Assembly and Packaging

• Assembled, tested, and packaged in ISO Class 5 or higher cleanrooms to prevent contamination.

• Optional pre-conditioning or inert gas flushing prior to shipment.

Safety and Compliance

• Designed to meet strict safety standards for high-purity and high-pressure gas systems.

• Compatible with a wide range of high-purity, reactive, or hazardous gases, depending on materials and certification.

Applications:

• Semiconductor manufacturing processes (CVD, etching, lithography)

• High-purity chemical and pharmaceutical systems

• Analytical instrumentation requiring contamination-free gas control

• Laboratory, research, and high-purity process systems

Ultra High Pressure (UHP) diaphragm valves are precision-engineered to control and isolate gas or liquid flow in ultra-high-pressure systems. They are widely used in semiconductor, chemical, pharmaceutical, and analytical industries where contamination-free and leak-tight performance is essential.

Key Features:

Ultra High Purity Construction

• Electropolished 316L stainless steel with internal surfaces polished to Ra ≤ 0.25 μm.

• Metal-to-metal or elastomer-free designs to prevent contamination.

Leak-Tight Performance

• 100% helium leak-tested for hermetic sealing.

• Suitable for UHP gases, corrosive gases, and high-purity liquids.

High Pressure Capability

• Reliable operation up to several thousand psi.

• Stable, precise flow control even under extreme pressure conditions.

Actuation Options

• Manual, pneumatic, or electric actuation available.

• Fast response for automated systems.

Cleanroom Assembly

• Assembled, tested, and packaged in ISO Class 5+ cleanrooms.

• Optional pre-conditioning or flushing with inert gases.

Safety and Compliance

• Meets stringent safety standards for high-pressure applications.

• Certified for use with hazardous or reactive gases, depending on model and certification.

Applications:

• Semiconductor fabrication (CVD, etching, lithography)

• High-purity chemical and pharmaceutical systems

• Analytical instrumentation

• Aerospace, research, and laboratory high-pressure systems

Ultra High Purity (UHP) fittings are precision-engineered connectors designed for reliable and contamination-free integration of regulators, valves, and gas distribution systems. They are essential in semiconductor, pharmaceutical, chemical, and analytical applications where leak-tight and particle-free gas delivery is critical.

Key Features:

Ultra High Purity Construction

• Manufactured from electropolished 316L stainless steel to minimize particle generation.

• Internal surface finish Ra ≤ 0.25 μm to reduce adsorption and ensure easy cleaning.

• Designed for ultra-clean applications, often free from lubricants or elastomers.

Leak-Tight Performance

• 100% helium leak tested to ensure hermetic sealing.

• Metal-to-metal sealing technology (e.g., VCR®, VCO®, or compatible face seal designs).

• Reliable under both vacuum and high-pressure conditions.

Versatile Connection Options

• Widely used for regulator adapters, gas panel connections, and line transitions.

• Available in straight, elbow, union, and reducer types to fit different layouts.

• Compatible with orbital welding, compression, and face seal connections.

Cleanroom Assembly and Packaging

• Assembled, tested, and double-bagged in ISO Class 5 or higher cleanrooms.

• Delivered particle-free and ready for direct installation in UHP gas systems.

Safety and Standards Compliance

• Designed to meet SEMI and international standards for UHP systems.

• Suitable for inert, reactive, and specialty gases used in critical processes.

Applications:

• Regulator and valve adapters for UHP gas delivery systems

• Semiconductor manufacturing (CVD, ALD, etching, lithography)

• High-purity chemical and pharmaceutical processing

• Analytical instrumentation and laboratory research gas lines

Our automatic gas supply cabinets are custom-built solutions, designed and manufactured according to your specific application needs. From layout to component selection, every detail can be tailored to ensure optimal performance and convenience for your system.