Comet AG

By combining high-resolution 3D X-ray capabilities with AI-driven automated defect recognition (ADR) for solder bumps, the CA20 helps to detect systematic challenges faster than ever before.

Now available as a fully-automated solution, it seamlessly integrates into the Fab’s material and information flows to deliver actionable real-time metrology data for assuring product quality and maximizing yield.

Highlights

The proven FF35 CT comes with a new 160 kV nanofocus X-ray tube. Combining the classic advantagesof open and closed tubes, it is perfect for specimen requiring long scanning times or for continuous operation while delivering reliable 600 nm detail visibility and ultimate repeatability. 

The FF35 CT Semi can be configured in a single-tube or a dual-tube set-up by adding the 225 kV microfocus tube which makes it a very versatile and fast solution for semiconductor labs. 

Synertia® allows to manage the complexities of multi-layer next-generation memory and atomic-scale plasma processes. The unique, patented controls of Generator and Matching Network interact at highest possible speeds. These actionable insights enable more complex plasma applications than have ever been possible before.

RF Power Generator Synertia® RFG

Users fully control the unique performance accelerators of Synertia® RF generators, including:

• Multilevel pulsing that is tunable and highly configurable to deliver precise and repeatable control of the plasma.

• Consistent performance over millions of process steps.

• Advanced visualization of critical measurement and control parameters. This enables acceleration of process optimization and speeds time to solution. A wide variety of smart data sets for debugging, troubleshooting, and targeted analytics.

Higher yield is the result of Synertia®’s fast and agile process control, which delivers superior repeatability, faster tuning, and custom wave-shaping.

The design, construction and processing of Comet Vacuum Capacitors combined with decades of experience in precision manufacturing assure outstanding quality standards. The unique modular design of the capacitors allows a high degree of flexibility in production and guarantees delivery of special types on very short notice. The superior performance and reliability of the products have been proven by hundreds of thousands of units in operation at customers worldwide. The universal design matches with a wide range of sockets and most units are electrically and mechanically compatible and interchangeable.

Comet's advanced Vacuum Capacitor technologies:

Universal Motorized Capacitor

Motorized Capacitors are the ideal solution for high-precision operation. Besides ensuring highest accuracy, capacitors with integrated drive system simplify procurement with an easy-to-install subsystem. The core component of the Universal Motorized Capacitor is a Comet variable vacuum capacitor, which includes an insulating cover, coupler and stepper-motor to drive the capacitor. A durable, backlash-free coupler connects the capacitor to the drive system. Assembled flanges ensure easy mounting in the system. Appropriate high-voltage insulation between the capacitor and the mounting flanges is also included.

Vacuum Capacitor with hybrid-cooling technology

Comet hybrid-cooling technology has been developed as an extension of the well-known Hexa-Con product range. The first hybrid-cooled, small size capacitor series offers users the best of both worlds: the compact size allows the use of higher power within the same matchbox size, and users profit from reduced total cost of ownership at the same time. When comparing diameter versus power density, the Hexa-Con series with hybrid-cooling technology is best in class.

XtraVolt Vacuum Capacitors for low frequency applications

With the XtraVolt low frequency vacuum capacitor product range Comet meets these needs with higher voltage capability compared to standard products. This allows significant higher voltage in a compact size vacuum capacitor keeping the same form factor. The new XtraVolt low frequency vacuum capacitors with higher field strength capability can achieve higher voltage. This allows increased RF current capability and higher power density.

Reliably delivering 400 nm resolution balanced with optimized dose settings, FYNE provides precise inspection of the most advanced samples without sacrificing efficiency. Our balanced approach empowers faster, more detailed analysis in cutting-edge applications in advanced packaging, materials science and NDT inspection.

Superior focal spot stability

Reliable nanoscale imaging goes together with great source stability. The FYNE module ensures exceptional focal spot stability during extended imaging sessions, meaning you can operate with peace of mind.

Uninterrupted performance

Advanced filament technology extends the lifespan by 10 times compared to our previous open tube technology, enabling thousands of hours of uninterrupted inspection. By significantly reducing the frequency of maintenance and associated disruptions, this advancement maximizes operational uptime.

FYNE delivers a balanced solution that combines precision, reliability, and efficiency.