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Agileo Automation

11 rue Victor GRIGNARD
POITIERS,  F-86000

France
http://www.agileo.com
  • Booth: C2518


Control & Connectivity for Equipment Manufacturers SECS/GEM

Agileo Automation provides control and connectivity solutions for semiconductor equipment manufacturers

Our customers are mainly Original Equipment Manufacturers of production machines that equip the factories of semiconductor and precision electronics companies worldwide. We provide SECS/GEM and GEM300 licensed libraries, internal equipment control libraries and cost-competitive integration services to a global installed base.

Experts in the semiconductor industry, Agileo Automation supports our customers from the design and internal control of their machines to connection to the IT systems for production control in factories all over the world.

We develop software modules that are integrated by our teams and/or those of our customers on production machines.

Agileo understands the issues faced by semiconductor equipment manufacturers and instills this mindset throughout the company by:

- Understanding the purpose of the machine and its hardware architecture
- Working with end customers (Tool owner and IT team)
- Bringing the machine into production within the agreed deadlines
- Prioritizing the support of software and technicians in the field


 Press Releases

  • New SECS-II library helps fabs and OEMs integrate semiconductor tools with the MES in hybrid manufacturing sites, ensuring faster time to market and limiting integration costs

    MUNICH, November 18, 2025 - Agileo Automation, a leading provider of control and connectivity solutions for global semiconductor manufacturing, today unveils Agil’SECS-II at Booth #C2518 at SEMICON Europa 2025. This new SECS-II library, featuring built-in SEMI standard communication, enables a manufacturing execution system (MES) to accelerate the integration and validation of hybrid semiconductor and traditional manufacturing tools on production lines, ensuring faster time to market, lower integration costs, and reduced deployment risks. With this connection gateway, users can send and receive any SEMI SECS-II-compliant message as host or equipment for full GEM and GEM300 equipment integration and validation. This product can prove valuable for a variety of customers:
    Pure semiconductor original equipment manufacturers (OEMs) that need a practical way to develop an MES simulator and exercise their equipment under fab-like conditions. For small production lines or multi-tool set-ups exchanging data through SECS/GEM, Agil’SECS-II allows OEMs to design, test, and validate their equipment efficiently before shipping it to fabs.
    Customized, multi-industry, or low-volume production sites that use an MES system to integrate both traditional production machines and semiconductor tools. Agil’SECS-II simplifies integration in mixed equipment environments, especially where the MES cannot use SECS/GEM because most tools rely on protocols such as OPC UA, Modbus, or MQTT, yet semiconductor equipment using SECS/GEM must be integrated within the same MES. 
    Laboratories and pilot lines without a full-featured MES that require a driver to collect data from various types of manufacturing equipment, including process, inspection, and metrology tools, to ensure quality and process control as well as complete traceability.
    “With Agil’SECS-II, we wanted to provide a flexible tool that can serve multiple types of customers who can benefit from a proven software foundation built on more than 15 years of deployment experience in semiconductor fabs worldwide,” explains Marc Engel, chief executive officer of Agileo Automation. “Our SECS-II driver is especially useful for validating the processes of hybrid fabs that combine semiconductor and non-semiconductor manufacturing equipment, such as silicon carbide (SiC) wafer production lines or advanced packaging lines. It enables product and process traceability with legacy MES and helps OEMs developing equipment for these lines create MES simulators to verify information flow between tools using heterogeneous communication protocols.”
    - ends -

    About Agileo Automation

    Agileo Automation is a trusted partner for equipment manufacturers, helping them build smarter, automated, and more connected machines that integrate seamlessly into advanced semiconductor fabs. Founded in 2010 in Poitiers, France, Agileo Automation helps OEMs optimize control, communication, data acquisition, and testing across their tools through proven software frameworks, applications, and expert support. Its flagship A²ECF-SEMI framework provides a solid foundation for developing equipment controllers fully aligned with SEMI SECS/GEM, GEM300, and EDA standards. As an active member of SEMI and the OPC Foundation, Agileo Automation contributes directly to shaping the standards that drive Industry 4.0 manufacturing. For more information, please visit our website or follow us on LinkedIn.


 Products

  • A²ECF SEMI
    ECF Semi is a software framework for process or metrology equipment control including EFEM (robotics loading platform) management. ...

  • A²ECF Semi is intended for equipment manufacturers in the semiconductor, electronics or photovoltaic industries.
    Higly customizable, this SEMI E95 compliant framework proposes a standardized way to present user interface for semiconductor applications:
    • Multiuser management with access rights (operator, process engineer, field service engineer for example)
    • Automatic trace generation with tools to analyze equipment activity
    • Operator actions recording 
    • EFEM devices management such as (contact us for list of supported devices):
      • Wafer handlers with one or dual arms
      • Pre-aligners
      • Load Ports and FOUP Openers
      • Scribe readers
    • Schedulers for wafer flow sequencing
    • Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library Agil'GEM or GEM300 (GEM + 300mm automation standards including in particular Carrier Management, Process Job, Control Job and Substrate Tracking through Agil'GEM300)

  • AGIL'GEM
    Agil'GEM is a SECS/GEM and PV2 Software library for semiconductor, electronics and photovoltaic production equipment connectivity. ...

  • GEM services:
    • Equipment communication state and control state
    • Process program
    • Collection event sending
    • Variable data collection
    • Status data collection
    • Remote control
    • Alarm management
    • Equipment constants
    • Equipment Terminal Services
    • Clock
    • Trace data collection
    • Limits monitoring

    SEMI standards:

    • SEMI E4 SECS-I (serial protocol)
    • SEMI E37.1 HSMS-SS (ethernet protocol)
    • SEMI E5 SECS-II (message format)
    • SEMI E30 GEM
  • E84 PIO BOX
    Interface Between Speech Scenario and E84 Passive Equipment ...

  • Features : 
    • Directly connects to load ports
    Equipped with a DB25 connector for straightforward integration with E84 passive systems such as load ports
    • Simple connection to PC via USB
    USB-powered device with a direct connection to the PC
    • Compact, lightweight design
    Only 280g (0.62lb) – Easy to carry and use in cleanrooms
    • Two comprehensive test plans
    E84 compliance test – Ensures accurate validation of E84 communication interfaces
    GEM300 AMHS compliance test – Verifies the combined use of E84 with E87, ensuring full compliance with automatic carrier delivery
    • Also available for active equipment tests
  • Speech Scenario
    SECS-II emulator for Host or Equipement Emulate the Fab Host to validate your SECS/GEM tool scenarios before shipping your equipment. ...

  • Features:

    • Receive and Send any SECS-II compliant message (including E40, E94, E87,…)
    • Create your own messages in SMN
    • Use data to parameterize your messages
    • Associate different sessions to different kind of tools
    • Use transparently Serial or Ethernet communication
    • Use several communication configuration
    • Provide logs in SMN (E173) SEMI standard to your customers prior to tool shipment
    • Log CEIDs with a meaningful name
    • Emulate Host or Equipment with one software

    Technical details:

    • Native .Net application
    • Based on Agileo Automation’s field-proven SECS-II drivers
    • Run on Microsoft® Windows® 7 x86 and x64, Microsoft® Windows® 10 x64
    • Supports E4 SECS-I (serial protocol), E37 HSMS-SS (ethernet protocol), E5 SECS-II, E173 XML SECS-II Message Notation

  • AGIL’ SORTER
    Software for sorters : wafer identification and transfer A complete software to control wafer sorters ...

  • Main features:

    • Software for 200mm or 300mm wafer sorters
    • Hardware options: 1 to 4 Load ports, 1 robot, 1 to 2 aligners, 1 to 2 Wafer ID Readers (Cognex), E-84 with dedicated electronic cards.
    • Must be adapted according to the OEM's communication hardware interface and specific functionalities
    • Can be put in OEM colours
    • Based on A²ECF SEMI

    Additional features:

    • User interface for operator including:
      • Tool status with wafer mapping and scribe read results
      • Login with user access
      • Ready to be translated
    • Process program configuration for sorters with :
      • User-defined sorting at execution
      • User-defined sorting at configuration
      • Sorting by wafer id
      • Pre-defined sorting algorithms
    • Jobs and high throughput wafer scheduler with :
      • Process program execution
      • Local user control or Remote control from the MES
    • SECS/GEM interface (SEMI E37, E5, E30)
    • GEM300 (SEMI E39, E90, E40, E94, E87) option with Agil'GEM300
    • Communication with hardware (to be specialized)
    • Maintenance Mode with On-Line/Off-Line Diagnostics
    • Software and Hardware configuration
    • Simulator for software maintenance, pre-integration of factory connectivity and customer demonstrations
    • Documentation:
      • User Manual
      • Automation (SECS/GEM or GEM300) interface description
    • Run on Windows 7 or Windows 10 x86 or x64
  • AGIL'SECS-II
    Agil’SECS-II is a practical software solution for connecting Host (also known as MES or EAP) systems and manufacturing equipment through SECS/GEM or GEM300 standards. ...

  • It is ideal for OEMs testing new tools, fabs integrating semiconductor processes into existing MES, or labs collecting data from diverse equipment for quality and process control.

    Features :

    • Send / receive any SEMI SECS-II-compliant message as host or equipment
    • Validate GEM and GEM300 quickly
    • Create a test MES to test your equipment
    • Benefit from built-in SEMI standard communication functionalities
    • Conduct transparent switching between TCP / IP & RS-232
    • Cut defects with schema-validated, SED-aware messages and SMN logs
    • Trace products and process with legacy MES 
    • Verify information flow between tools using heterogeneous communication protocols

    Benefits :

    • Ensure faster time to market
    • Lower integration costs
    • Reduce deployment risks
    • Rely on off-site and on-site software support

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