Loading...

CS CLEAN SOLUTIONS GmbH

Fraunhoferstrasse 4
Ismaning,  85737

Germany
http://www.csclean.com
  • Booth: B1221-1


YOUR PARTNER FOR EXHAUST GAS TREATMENT

With nearly 40 years of experience, CS CLEAN SOLUTIONS GmbH is your reliable partner for exhaust gas abatement in semiconductor, photovoltaic and related industries.

As the global technology leader in our field, our dry exhaust gas abatement does not require the use of fossil fuels or water providing additional benefits to the environment and the climate.

  • Exhaust gas treatment for e.g. ion implantation, plasma etching, chamber cleaning, photovoltaics, HDP-CVD, LPCVD, PECVD, MOCVD, ALD

  • Safe, dry-chemical conversion of toxic gases into stable solids

  • Solutions for research and production

  • Global network for service and refill through local partners

The new product line PCS PLASMA CONVERSION SYSTEMS now enhances the CLEANSORB® product portfolio.

PCS TROPO/ PCS STRATO: high-efficiency atmospheric plasma for the removal of perfluorinated compounds (PFCs) emitted during semiconductor etching and related processes. Resource-saving and water-free operation.

PCS EXO: ammonia and hydrogen removal - hybride plasma system for GaN and similar process applications.


 Products

  • CLEANSORB® GAS TREATMENT WITH CLEANSORB® PRIMELINE
    CLEANSORB dry bed exhaust gas abatement systems/ safety-critical process applications / Metal Organic Chemical Vapor Deposition (MOCVD) applications...

  • CLEANSORB® PRIMELINE

    The PRIMELINE series represents the fully-featured version of the CLEANSORB family of dry bed exhaust gas abatement systems. The system is especially engineered to handle the gas flows and related operating conditions of safety-critical process applications – notably those of Metal Organic Chemical Vapor Deposition (MOCVD).

    The smaller-footprint CLEANSORB PS models feature a back-up column, allowing production to be run to completion even after the capacity of the main absorber column has become depleted. The larger CLEANSORB PD model incorporates two full-size absorber columns plus a back-up column; one main column can remain active absorbing exhaust gas with full SEMI-S2-compliant safety protection, while the second column is independently purged before removal from the cabinet for refilling.

    CLEANSORB® PRIMELINE advantages

    • Dedicated CLEANSORB chemisorber media for critical MOCVD gases such as AsH3, PH3 or GeH4
    • Optimized for safe thermal management of high flow silicon and III-V epitaxial processes
    • Unique safety functions such as infra-red temperature monitoring and inert gas cooling
    • Touch-screen control (PD model) with automated operating routines
    • Available as SEMI-S2 compliant version with redundant safety features

    We will be happy to answer specific questions you might have – please call us or send us an e-mail.

  • CLEANSORB® FABLINE FX
    Exhaust gas treatment by CLEANSORB FABLINE FX / Dry bed abatement / specific process application, including: Plasma Etching, CVD, ALD, Ion Implantation and CIGS Photovoltaics...

  • CLEANSORB® FABLINE FX

    Exhaust gas treatment by CLEANSORB FABLINE FX is the latest version of the series that has proven its reliability in thousands of CS CLEAN SOLUTIONS installations worldwide. An additional backup column on the FABLINE FX product offers the benefits of an uninterrupted operation using the dual-column model, but with a smaller footprint.

    Operating modes and system status are conveniently visualized and selected via a touch-screen display. Gas purging and leak testing of the absorber column are fully automated for flue gas cleaning. With the safety and performance of all CLEANSORB chemisorber media, FABLINE FX is the model of choice for your specific process application, including:

    Plasma EtchingCVDALDIon Implantation and CIGS Photovoltaics.

    FABLINE FX Advantages

    • Passive operation, no power, heating, fuel or water required
    • Made of corrosion resistant 316L stainless steel and high quality components
    • Advanced remote connectivity via USB, Ethernet, FTP, NTP, OPC
    • Wide range of configurations and options, including integrated fan
    • Available in SEMI-S2 compliant version with redundant safety features

    We will be happy to answer specific questions you might have – please call us or send us an e-mail.

  • CLEAN-PROTECT HAZARDOUS GAS DISPOSAL CLEAN-PROTECT
    CLEAN-PROTECT hazardous gas disposal provides protection from hazardous gases in the event of uncontrollable leaks....

  • CLEAN-PROTECT HAZARDOUS GAS DISPOSAL

    CLEAN-PROTECT hazardous gas disposal provides protection from hazardous gases in the event of uncontrollable leaks.

    Hazardous process gases commonly used in the chemical, pharmaceutical, and semiconductor industries are usually supplied from cylinders in an air-extracted cabinet.

    CLEAN-PROTECT is a specialty dry-bed absorber, designed to absorb toxic, corrosive or flammable gases in the event of a gas leak. These emergency gas absorbents have been protecting workplaces and factory environments around the world for decades.

    Suitable for a wide range of problematic harmful gases from the manufacturing process such as:

    AsH3, BF3, Br2, Cl2, ClF3, COCl2, F2, HCl, HF, HBr, H2S, H2Se, HCN, NH3, N2H4, PH3, SO2.

    CLEAN-PROTECT Advantages for Exhaust Gas Purification

    • High air extract flow rates, protection for multiple gas supply cabinets
    • Scrubbing capacity for an entire gas cylinder
    • Low pressure drop during gas purification
    • Continuous operation, virtually maintenance free
    • Passive operation – requires no electricity or other resources
    • Absorber bed replacement only required after 5 years of regular operation

    We will be happy to answer specific questions you might have – please call us or send us an e-mail.

  • CLEANVENT GAS PURGE
    CLEANVENT gas purge by CS CLEAN SOLUTIONS is applied before a new gas cylinder is commissioned....

  • CLEANVENT GAS PURGE

    CLEANVENT gas purge by CS CLEAN SOLUTIONS is applied before a new gas cylinder is commissioned. Very small but significant amounts of process gas must be removed from each gas cabinet. Purging residual gas from the last cylinder is mandatory both for safety reasons and to ensure the purity of the next gas supply.

    Residual gases are usually highly concentrated, toxic, self-igniting or corrosive and therefore pose a significant hazard. The CLEANVENT cartridge has been proven for decades to be an extremely reliable solution for the removal of hazardous gases in exhaust gas cleaning.

    CLEANVENT GAS PURGE advantages

    • Removal of harmful gases directly at the point of origin in the gas cabinet or specialty gas manifold
    • Reliable, irreversible conversion of gases to stable solids at room temperature
    • Available for over 100 different gases and organometallic precursors
    • Service and refill through our worldwide service network

    We will be happy to answer specific questions you might have – please call us or send us an e-mail.

  • PCS TROPO & PCS STRATO
    Plasma Conversion Systems to destroy perfluorinated compounds such as CF4, CHF3, SF6 and NF3 that are emitted from semiconductor etch and related processes. ...

  • Plasma Conversion PCS TROPO & PCS STRATO

    The PCS TROPO and PCS STRATO atmospheric plasma conversion systems are high performance plasma sources, developed to destroy perfluorinated compounds such as CF4, CHF3, SF6 and NF3 that are emitted from semiconductor etch and related processes.

    The reactive by-products created by both PCS systems are best removed using a CLEANSORB® dry bed chemisorber. For existing installations requiring PFC removal capability, both PCS systems are readily retrofitted upstream of existing abatement systems such as central wet scrubbers.

    Your advantages

    • Superior Destruction-Removal-Efficiency (DRE) of PFC gases
    • Optimized combustion with low NOx-emissions up to 50% compared to other abatement systems
    • No additional fuel gas, extremely low CoO
    • Hybrid technology using direct and indirect energy sources
    • Resource-saving, water-free operation
    • Increased productivity
    • Low installation costs
    • Low operating costs
    • Low maintenance costs

    We will be happy to answer specific questions you might have – please call us or send us an e-mail.

  • PCS EXO
    Plasma Conversion System EXO to destroy NH3...

  • Plasma Conversion PCS EXO

    The PCS EXO system is a high performance plasma source, developed to destroy NH3 which is emitted from GaN and related processes.

    For existing installations requiring NH3 removal capability, the PCS EXO is readily retrofitted. Chlorine used during cleaning steps is best removed using a CLEANSORB® dry bed chemisorber.

    Your advantages:

    • Combustion of up to 200 slm NH3 and 400 slm H2
    • Optimized combustion with low NOx-emissions up to 50% compared to other abatement systems
    • No additional fuel gas, extremely low CoO
    • Hybrid technology using direct and indirect energy sources
    • Resource-saving, water-free operation
    • Increased productivity
    • Low installation costs
    • Low operating costs
    • Low maintenance costs

    We will be happy to answer specific questions you might have – please call us or send us an e-mail.


Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".