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BIBUS GmbH

Max-Eyth-Str. 41 /1
Neu-Ulm,  Bavaria  89231

Germany
https://technology.bibus.com/de-de/
  • Booth: B1221-2


BIBUS GmbH Innovations shaping the future of microelectronic

BIBUS GmbH – Your Partner for Innovative Engineering Solutions
BIBUS GmbH is part of the internationally active BIBUS Group and has been delivering technical solutions in pneumatics, mechatronics, and environmental technology for decades. With deep expertise, a strong partner network, and a clear focus on quality and customer proximity, we support companies in realizing demanding projects – from microelectronics to industrial automation. At SEMICON Europa 2025, we showcase smart components and systems that combine precision, efficiency, and sustainability. Our promise: Engineering Support – competent, reliable, and tailored to your needs.


 Press Releases

  • BIBUS GmbH – Smart Solutions for Semiconductor Innovation
    At SEMICON Europa 2025, BIBUS GmbH presents cutting-edge technologies for the semiconductor industry. As part of the global BIBUS Group, we specialize in pneumatics, mechatronics, and environmental systems that drive precision, efficiency, and sustainability. With decades of engineering experience and a strong network of partners, we support future-oriented developments in microelectronics and automation. Discover our commitment: Engineering Support – tailored, reliable, and close to your needs.

  • BIBUS GmbH – Smarte Lösungen für die Halbleiterindustrie
    Zur SEMICON Europa 2025 präsentiert die BIBUS GmbH innovative Technologien für die Halbleiterbranche. Als Teil der weltweit tätigen BIBUS Gruppe bieten wir Lösungen in Pneumatik, Mechatronik und Umwelttechnik, die Präzision, Effizienz und Nachhaltigkeit vereinen. Mit jahrzehntelanger Engineering-Erfahrung und einem starken Partnernetzwerk unterstützen wir zukunftsorientierte Entwicklungen in Mikroelektronik und Automatisierung. Unser Versprechen: Engineering Support – maßgeschneidert, zuverlässig und kundennah.


 Products

  • BIBUS Z-Stage
    Linear Motor Driven High Accuracy Height Adjustment Platform...

  • Product Highlights:

    StageLifting height positive direction: 5 mm ↑

    Lifting height negative direction: 5 mm ↓

    Max. lifting speed: 50 mm/s

    Max. acceleration: 5 m/s²

    Linearity accuracy: 8.3 μm

    Bidirectional repeatability: 0,2 μm

    Minimum incremental motion: < 50 nm (depends on the load on the stage)

    Effective load capacity: 185 N

    Maximum load capacity: 370 N

    Motor: Ironless linear motor (voltage level 48Vdc)

    Motor connection: Intercontect Itec 9 poles connector

    Feedback connection: 15 poles SUB-D connector (male type)

    Feedback type: Absolute ( BISS-C)Feedback accuracy: +-1 μm

    Limit switch positive: NC, PNP type, adjustable

    Limit switch negative: NC, PNP type, adjustable

    Limit switch connector: 15 poles SUB-D together with the absolute encoder

    Mechanical stroke limitation: Yes, adjustable, with fine thread

    Surface treatment: Black anodized surface MIL-A-8625, Type II, Class II

    Cleanroom ISO Class 1

    Part number: BS-018-25-00

    Weight: 6750 g


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