The equipment features are as follows:
1, Integrated framework structure, reasonable layout, novel appearance, and easy operation;
2, Calibration function for working position, fast, accurate, and high precision;
3, Integrated design, small floor space, high throughput;
4, Customized multi slot structure can achieve 2, 4, 6, and 8 chambers , improving efficiency;
5, Capable of cleaning both the front and back simultaneously;
6, Compatible with acidic solution cleaning/alkaline solution cleaning;
7, Advanced particle and metal impurities control technology;
8, Advanced atomization cleaning technology achieves non-destructive cleaning;
9, With bevel clean function to reduce defect
10, Real time, high-precision parameter closed-loop control technology; High reliability, safety, and low maintenance costs