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SVCS s.r.o.

Optátova 37
Brno,  CZ-63700

Czech Republic
http://www.svcs.com
  • Booth: C2213

Our experience is based on a long history and tradition of the semiconductor industry in former Czechoslovakia, in a place called the Czech Silicon Valley. For over 25 years we have been striving towards development of the tomorrow’s tools and tomorrow’s process innovations. To do this successfully, we cooperate with leading R&D laboratories, universities and scientific institutes. The company’s headquarters and production plant are located in the Czech Republic. We have world wide network of business representatives, including SVCS Service Centres in China, India, Russia and the USA. SVCS has delivered installations for customers all over the Planet, for example: Australia, Belgium, Denmark, France, China, India, Japan, Korea, Lithuania, Malaysia, Mexico, Okinawa, Poland, Singapore, Slovakia, Taiwan and the USA.

 Products

  • Compact Tabletop Furnaces
    Unique Compact Design, All Features of the Grown-up Furnace...

    • Features and Benefits

    • Ideally suited for R&D labs and pilot fabs
    • Small footprint
    • Table or standalone solution (with stands)
    • Stackable desing (e.g. double tabletop variant)
    • Low power consumption
    • Easy operation and maintenance
    • Heating element with 1 or 3 temperature zones and max. temperature up to 1300 °С
    • Modern modular proprietary control system
    • Up to 8 gas lines and 2 liquid sources
    • Independent hardware safety interlocks
    • Integration of vacuum pump systems in cooperation with leading pump manufacturers
  • High Temperature Furnaces
    All-in-one SiC Vertical Furnaces...

    • Temperatures up to 2000°C | Hermetically sealed loading area | Controlled atmoshpehe loadlock chamber | Vacuum processes | Touchscreen operator interface placed on cleanroom wall | Automatic wafer handling system for loading wafers | Unique temp. measurement by spike and profiling TC combine with pyrometry | 7 independent water cooling circuits with the flow rate and temp. monitoring

  • Horizontal Furnaces
    Designed for High Performance in Production Environment while stays Efficient and Economic...

    • Features and Benefits

    • Maintenance friendly mechanical design
    • State of the art modular control system, in-house designed and manufactured
    • 10,4“ high-res touchscreen for operator interface
    • Up to 4 stacked quartz or SiC tube reactor chambers for various procesess
    • No thermal interference between different tubes
    • Contactless fully automated boat-in-tube loading both cantilever or softlanding configurations
    • Independent tube level control system
    • HW safety interlocks independent on main CPU
    • HEPA or ULPA filtres installed in load station
    • Boat elevator and wafer handling automation
    • UHP face seal fittings and welds for connections
    • UHP orbital weldings made in 100/10 Cleanroom
  • Vertical Furnaces
    Configurable for Production or R&D Applications...

    • Features and Benefits

    • Automatic wafer handling system for loading wafers from SMIF or FOUP closed pods
    • Special automatic loading system which allows loading wafers from open cassettes and provides an exceptionally small footprint
    • Quartz or SiC boats can be used 
    • Highly tailored state of the art modular control system, in house designed and manufactured
    • 10,4“ high-res touchscreen for operator interface 

Categories

202 Other Equipment
  • Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
    • 206 PV Equipment
  • Cells
    • 207 Process Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment

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