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Hine Automation, LLC

12495 34th St N, Suite B
Saint Petersburg,  FL  33716

United States
http://www.hineautomation.com
  • Booth: B1916


Flexible, reliable wafer handling automation for semi OEMs

Hine Automation designs and manufactures precision robotic wafer handling systems and components for semiconductor OEMs worldwide. Our modular, cost-effective automation solutions combine flexibility, reliability, and exceptional support to meet the industry’s most demanding applications.

Key products include:

  • Vacuum handlers
  • EFEMs
  • Vacuum and atmospheric wafer transport robots, elevators, and pre-aligners
  • Cassette-capable and single-wafer load locks
  • Hine product spares and service support

For additional information, please visit our website at www.hineautomation.com or contact us at [email protected]

 Products

  • Hine Vacuum Handlers – Precision Robotic Wafer Han
    Precision vacuum wafer handling systems for substrates up to 200, 300, or 450 mm....

    • Hine Automation’s vacuum handlers provide precise and reliable wafer transfer within controlled environments, enabling OEMs to achieve optimal tool performance and uptime. Designed for modular integration, Hine vacuum handlers support substrates up to 200 mm, 300 mm, and 450 mm and are ideal for cluster tool configurations that combine multiple process modules into a single platform. Engineered for repeatability, low particle generation, and long service life, these systems meet the demanding requirements of vacuum applications in semiconductor manufacturing and R&D.
  • Hine EFEM – Modular Equipment Front-End Modules
    Custom-configurable EFEMs for substrates up to 300 mm, built for precision and flexibility....

    • Hine Automation’s Equipment Front-End Modules (EFEMs) offer semiconductor OEMs a modular, cost-effective interface between process tools and fab automation. Each EFEM is configurable for specific throughput, cleanliness, and wafer size requirements up to 300 mm. Integrating Hine’s proven wafer transport robots, elevators, and pre-aligners, our EFEMs deliver exceptional precision and reliability in both atmospheric and vacuum environments. Designed and built in the USA, Hine EFEMs balance performance, scalability, and value for today’s evolving automation needs.
  • Hine Wafer Handling Components – Robots, Elevators
    Vacuum and atmospheric wafer handling components for substrates up to 200, 300, or 450 mm....

    • Hine Automation offers a complete range of wafer handling components engineered for precision and modular integration. Our vacuum and atmospheric wafer transport robots, elevators, and pre-aligners support substrates up to 200 mm, 300 mm, and 450 mm. Designed for smooth motion control, high positional accuracy, and long-term reliability, these components integrate easily into OEM tools or serve as stand-alone automation subsystems, providing scalable solutions for both R&D and high-volume manufacturing.
  • Hine Load Locks – Cassette-Capable and Single-Wafe
    Cassette-capable and single-wafer load locks for substrates up to 200, 300, or 450 mm....

    • Hine Automation designs and manufactures cassette-capable and single-wafer load locks for precise, contamination-free wafer transfer between atmospheric and vacuum environments. Supporting substrates up to 200 mm, 300 mm, and 450 mm, Hine load locks are built for reliability, repeatability, and clean operation. Available in modular configurations, they integrate seamlessly with Hine EFEMs and robotic wafer handling systems, providing OEMs with efficient and proven solutions for controlled environment automation.

Categories

200 Packaging and Assembly Equipment
  • Device Handling; Feeding Systems
    • 202 Other Equipment
  • Repair; Rework Equipment
    • 207 Process Equipment
  • Transfer Systems for Wafer; Reticles or FPD's
    • 304 Mask Making Materials
  • Mask and Reticle Handling Products
    • 401 Sub-systems
  • Handling; Transfer; Loading Systems; Lifting devices
    • 502 Material Handling Systems
  • Robotics; Transfer Systems
    • 700 Manufacturing Services
  • Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
    • 701 Manufacturing Services or Consulting
  • Assembly
  • Automation & Robotics
  • Equipment; Hardware; Product Design, Integration and Manufacturing
  • Wafer Handling
    • 900 Support Products
  • Device; Wafer; Display Panel Handling Products
    • 901 Printed, Organic, Flexible and Large Area
  • Equipment: Material Handling

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