cyberTECHNOLOGIES GmbH

Georg-Kollmannsberger-Str. 3
Eching,  Bavaria  85386

Germany
http://www.cybertechnologies.com
  • Booth: C1101

ADVANCED METROLOGY SOLUTIONS for Fab & Lab

cyberTECHNOLOGIES is a global leader in high-end metrology solutions for semiconductor applications.

The portfolio spans from compact systems for labs and process qualification to fully automated, multi-sensor platforms with integrated material handling. Engineered for high-accuracy, throughput, and nonstop operation in fabs.

The systems are used worldwide by IDMs, foundries, and OSATs, supporting high-volume production and R&D with reliable nano-resolution, high-speed measurements across the process chain from front- to back-end.

cyberTECHNOLOGIES solutions support a wide range of applications, including:

  • Wafer (Warp, Bow)
  • Thickness & Thickness Variation (TTV / LTV)
  • Thinfilm (down to 10 nm)
  • Step Heights
  • (µ-)Bumps, Pins, Pads & Pillars (e.g. Coplanarity, Position)
  • Feature Sizes & Position
  • Laser groove (e.g. Width, Chipping)
  • Die Attach (e.g. Tilt)
  • Chiplets (e.g. Parallelism, Rotation)
  • Fillet Height
  • 3D Wirebond (e.g. Sway, Clearance)
  • Probe Cards (incl. Rework)
  • Thermal Warpage Measurement
  • Transparent Films & Coatings
  • Thickfilm
  • Roughness

…and MANY more.
 

See you in hall C1 at booth #1101!

www.cybertechnologies.com


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