INFICON GmbH

With our intelligent add-on SMART-Spray, a mobile, wire- and hoseless helium spray gun for the UL Family of leak detectors, you can elevate your leak detection to new heights:

Working with SMART-Spray makes your leak detection significantly faster, easier, more reliable and more effective while saving helium.Eliminating the connection hose and operation errors: SMART-Spray Helium Spray Gun makes leak testing more flexible and efficient than ever before. Forget time-consuming handling of bulky helium cylinders, working range limitation by a hose connection and error-prone manual adjustment of the helium flow. 

SMART-Spray is fully compatible with the UL Family of vacuum leak detectors. The main application is spray pin pointing in the semiconductor industry.

• UL1000 Fab Series and UL5000 
• UL3000 Fab Series
• UL6000 Fab Series

SMART-Spray helium spray gun enhances leak checking by eliminating the need for large helium cylinders and cumbersome hoses. It streamlines the process, reducing manual helium flow adjustments and minimizing errors. This tool makes leak detection faster, easier, and more reliable while maintaining low helium consumption and background levels. Ideal for efficient and precise leak testing.

I·BOOST offers up to 50% time savings in leak detection. With shorter response times, it delivers fast and precise measurements across various chamber volumes, enhancing efficiency and accuracy. Additionally , SPRAY-Check, a spray on test leak, ensures the functionality and readiness of your leak detector. Ideal for the 10⁻⁹ to 10⁻⁸ mbar∙l/s range, it provides reliable checks during testing processes.

INFICON Transpector APX remains the market leading Residual Gas Analyzer (RGA) for semiconductor and display process monitoring. INFICON knows semiconductor and display customers have unique needs, and the latest revision of the Transpector APX allows for more flexibility to meet specific application requirements, while maintaining industry leading measurement speed and sensitivity. Transpector APX is the ideal RGA process monitor for semiconductor processes such as ALD, CVD, PVD, and Etch.

The next generation Transpector APX Multi-Pressure inlet system is designed to survive process chemistries prone to particle or coating generation like ALD or PECVD. This allows for continuous monitoring to capture data points at all critical process steps. In addition the HexBlock inlet is available with INFICON proprietary coating for resistance to corrosive gases, essential for chamber clean endpoint monitoring applications.

Advantages

• Application specific platform design for longest lifetime on your ALD or CVD process for the best wafer and panel protection and process optimization
• ALD ready with measurement speeds of over 550 data points per second
• Reduced fab footprint by 30% and easier installation due ne high performance pumping system
• Configurable HexBlock™ with INFICON proprietary coating with up to three pressure inlets that can withstand harsh corrosive chemistry
• Automated calibration ensures long-term data reliability and accuracy for sensor to sensor and tool to tool chamber matching
• Transpector APX becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard® software and supported by INFICON world-class application experts

Smart Manufacturing through innovative process control and decision support software.

The most comprehensive and advanced Process Control and Maintenance Management Software Suite for the electronics manufacturing industry.  Our solutions are proven to increase capital productivity, labor efficiency and overall factory efficiency by detecting and predicting excursions, automating complex decision making, and delivering industry-leading process control capability.

For detailed information please visit our website.