The core: The SCI Conveyor System
Designed to transport reticles, wafer carriers, equipment, and/ or materials between different stages of the semiconductor manufacturing process efficiently and with extreme care.
Highly automated, with sensors, controls, and software ensure precise movement, positioning, and synchronization of materials throughout the fab. This automation minimizes the risk of human error and maintains a controlled and clean manufacturing environment.
The design of the conveyor system can vary depending on the specific manufacturing process and the layout of the facility.
For OHT transport: SCI Linear Hoist System
The Linear Hoist is our Overhead Transport Systems (OHTS) as well as storage system for the automated storage and retrieval and delivery of different reticles, wafer carrier types and/or tools throughout the intrabay.
It serves as a bridge between different tools and equipment, ensuring a smooth production flow while maintaining product integrity and cleanliness.
Available for all reticle pods such as: RSP, MRSP, Nikon, Canon
More Information:
Conveyor System Webpage
Linear Hoist System