Fabmatics GmbH

Zur Steinhöhe 1
Dresden,  D-01109

Germany
http://www.fabmatics.com
  • Booth: B1221-1


Material Handling Automation for Semiconductor Factories

Fabmatics specializes in material handling automation solutions for cleanroom environments, helping semiconductor manufacturers increase efficiency, safety, and traceability. With over 30 years of experience, we combine robotics, RFID, and software to deliver customized automation – from intralogistics to handling and storage.
At SEMICON Europa 2025, we present our latest innovations in Reticle Logistics Automation. Together with our sister company SCI, we offer a powerful bundle for automated reticle handling and storage:

  • HERO Scout: A mobile robot designed for safe and flexible transport of reticle pods in cleanrooms.
  • Linear Stocker: A proven system for high-density, automated reticle storage and retrieval.
  • Conveyor System / Linear Hoist System: Reliable cleanroom transfer for reticle pods.
  • EUV Reticle Handling: Our portfolio includes load ports, pod openers, mask grippers, EFEMs, and reticle sorters – all tailored to meet the highest standards of cleanliness and reliability.

Visit us at the Silicon Saxony Pavilion to explore how we transform reticle logistics into a fully automated process.


 Products

  • Mobile Robot HERO Scout
    Compact and flexible AMR for the automated handling and transportation of reticle pods...

  • The HERO Scout is a state-of-the-art mobile robot, specifically designed for flexible transportation and secure handling of reticle pods in semiconductor manufacturing and cleanroom environments. Equipped with an innovative 6-axis cobot, the HERO Scout effortlessly manages the loading and unloading of mask load ports at different heights. As the smallest cleanroom-compatible autonomous mobile robot on the market, it impresses with its ultra-clean quality and maximum reach. Discover the future of safe reticle pod transport with the HERO Scout – your solution for efficient and reliable production in the semiconductor industry.

    Key Features & Benefits:

    • Compact Size: Minimum footprint enables operation in narrow aisles and fab areas.
    • Long Reach: The 6-axis precision cobot arm is ideal for loading high, ergonomically challenging positions.
    • Flexible Operation: HERO Scout autonomously navigates with 3D cameras for obstacle detection and bypassing, providing both track-bound & freeroaming driving options to meet the most diverse production needs.
    • Safety First: Reliable sensors ensure safe operation in environments where humans and machines work closely together.
    • Fast Deployment: Short setup with SLAM and auto-teaching, minimal adjustments to production changes, and “auto-gripping” enable rapid re-engagement after maintenance, reducing downtime.
    • Cleanroom Compatibility: ISO 2 certified.

    More information: HERO Scout Webpage

  • Linear Stocker for Reticle Storage
    The Linear Stocker by SCI is a field-proven system designed for the automated storage and retrieval of reticle pods....

  • The Linear Stocker is our midsized storage system designed for the automated storage and retrieval of semiconductor reticles, but also wafer carriers or tools throughout various stages of the manufacturing process.

    This is a support system of precision and efficiency paramount in the production of microelectronic devices, serving as a bridge between different tools and equipment, that ensures a smooth flow of production while maintaining product integrity and cleanliness.

    Available for all reticle pods such as: RSP, MRSP, Nikon, Canon

    Key Features:

    • Up to ISO class 4
    • Storage Spaces: approx. 3000 (RSP)
    • Length: 5400 mm
    • Width: 1700 mm
    • Height: 6000 mm
    • Interfaces: SEMI-E88 MCS / SEMI-E84 Transfer

    More Information: Linear Stocker Webpage 

  • Transport Systems for Reticle Transfer
    Reliable cleanroom transfer for reticle pods: Conveyor System and Linear Hoist System...

  • The core: The SCI Conveyor System

    Designed to transport reticles, wafer carriers, equipment, and/ or materials between different stages of the semiconductor manufacturing process efficiently and with extreme care.

    Highly automated, with sensors, controls, and software ensure precise movement, positioning, and synchronization of materials throughout the fab. This automation minimizes the risk of human error and maintains a controlled and clean manufacturing environment.

    The design of the conveyor system can vary depending on the specific manufacturing process and the layout of the facility.

    For OHT transport: SCI Linear Hoist System

    The Linear Hoist is our Overhead Transport Systems (OHTS) as well as storage system for the automated storage and retrieval and delivery of different reticles, wafer carrier types and/or tools throughout the intrabay.

    It serves as a bridge between different tools and equipment, ensuring a smooth production flow while maintaining product integrity and cleanliness.

    Available for all reticle pods such as: RSP, MRSP, Nikon, Canon

    More Information: 

    Conveyor System Webpage

    Linear Hoist System
     


     


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