Micro System Integration Center, Tohoku University
We offer R&D support service for micro system technology.
Micro System Integration Center (µSIC) is a core center at Tohoku University that promotes research and development of MEMS/microsystem manufacturing and fusion technology through collaboration with industry and inside the university.
Within the Research and Development Division we are working on a wide range of topics, from materials to devices, systems, processing technology and metrology, in collaboration with laboratories of various research fields within the university. We also accept engineers from the private sector and support research, development and industrialization of MEMS/microsystems through industry-academia collaboration.
In Open Collaboration Division we utilize the 1,800 m2 clean room of the Junichi Nishizawa Memorial Research Center at Tohoku University to operate the “Hands-on-access Fabrication Facility”, the largest open facility for microfabrication in Japan.