LAUDA DR. R. WOBSER GMBH & CO. KG

Laudaplatz 1
Lauda-Königshofen,  97922

Germany
http://www.lauda.de
  • Booth: B1164


TEMPERATURE CONTROL SOLUTION FOR SEMICONDUCTOR INDUSTRY

We are LAUDA – the world leader in precise temperatures. Our Constant temperature equipment and systems are at the heart of important applications, contributing to a better future. As a full-service provider we guarantee the optimum temperature in research, production and quality control. We are the trusted partner for electromobility, hydrogen, chemical, pharmaceutical/biotech, semiconductor and medical industries. For almost 70 years we have been inspiring our customers with our competent consulting and innovative solutions, anew every day – globally.

In the production of semiconductors and the testing of electronic components, there are numerous processes that must be precisely temperature-controlled. These include, for example, plasma etching or metal organic vapor deposition (MOCVD) in semiconductor coating as a preliminary stage of LED production. Other typical temperature-dependent tests in the semiconductor industry are stress tests for functional and load testing, environmental simulations, and in-circuit tests for electronic assemblies.

 Products

  • Semistat S 2400
    Thermoelectric process thermostats from –20 to 90 °C for the semiconductor industry...

    • Fast and precise temperature control for complex processes. Based on the tried-and-tested principles of heat transfer used for Peltier elements, the LAUDA Semistat thermoelectric systems for temperature control offer reproducible temperature control for plasma etching applications.

    The dynamic temperature control of the electrostatic wafer chuck (ESC) makes it possible to use devices with all types of etching processes.

    Energy-efficient and space-saving, with stable temperature control, these clever systems are perfect for manufacturing ever-smaller components.

  • Integral IN 550 XT
    Powerful integral process thermostats for dynamic applications with high heating and cooling capacities...

    • LAUDA Integral XT process thermostats operate according to the flow principle with a cold oil blanket that enables the utilization of temperature control media over a significantly larger temperature range—optimal for dynamic temperature control tasks.

    The electronically controlled, magnetically coupled pump can set the flow rate optimally both for the requirements of pressure-sensitive consumers and for applications with high hydraulic resistance.

    A modular interface concept that is fit for the future ensures maximum networking of user processes. In addition, the Integral devices are already designed to use LAUDA.LIVE, a digital solution for remote maintenance and monitoring - for greater safety and reliability. 

Categories

208 Test Equipment
  • Discrete Component Test Systems
    • 309 Test Materials
  • Test Sockets; Contactors and Contact accessories
    • 400 Components, Parts & Accessories
  • Chucks for Wafer and other Substrates
    • 401 Sub-systems
  • Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
    • 701 Manufacturing Services or Consulting
  • Wafer Handling
    • 900 Support Products
  • Laboratory Apparatus and Supplies

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