Nikon's NEXIV VMZ-S series of video measuring systems delivers high accuracy, speed and usability for inspection applications down to the micro level. Capable of high-accuracy, high-speed measurement for fulfilling increasingly demanding inspection applications, the VMZ-S series is used in a wide range of industries.
Nikon’s video measurement systems, NEXIV, are used after various process steps to control geometric parameters across the wafers. Nikon’s world-renowned optics, combined with its high-precision measurement stage, offer the perfect solution to provide the most accurate measurements of dimensions down to micrometers. Over the last 30 years, the system has been constantly improved to meet the demands of customers and the industry. By delivering high-resolution images, precise dimensional measurement, and automated quality control, these systems enhance the accuracy, efficiency, and reliability of semiconductor production. As demand for smaller, faster, and more powerful electronic devices continues to grow, Nikon’s NEXIV systems will remain at the forefront, enabling manufacturers to meet the evolving challenges of this dynamic industry. The NEXIV system comes in different stage sizes and with optical heads adjustable to the customer’s demands. Flexible illumination and optical zoom guarantee a fast, accurate, and reliable system to measure line widths down to sub-micrometer size. The most common NEXIV system used in the semiconductor industry is the VMZ-S type TZ, which offers an 8-stage optical zoom from 1x up to 120x optical magnification.