Samco Inc.

• Booth: B1114

Samco Inc. - Plasma Etch, Deposition and Surface Treatment

Samco has been focused on providing cutting-edge thin-film process equipment and process technologies to our customers in R&D and device production.

• Etching (RIE system, ICP-RIE system, silicon DRIE system and ALE system)
• Deposition (PECVD system and ALD system)
• Surface Treatment (plasma cleaner and UV-Ozone cleaner)

• Etching:
  • silicon (DRIE using Bosch Process) and dielectrics
  • compound semiconductor (e.g. GaAs, InP, GaN and SiC)
  • metals (e.g. Nb, Al, Ti, Pt, Au and Ru)
  • polymers (e.g. photoresist and polyimide)
  • unique materials (e.g. diamond and sapphire)
• Deposition:
  • PECVD (SiO2, SiNx, SiON, a-Si and DLC)
  • ALD
• Surface treatment:
  • oraganic contaminant removal
  • surface activation
  • wettability improvement
  • PR ashing/descum
  • Cu/Ag/Au surface reduction and cleaning
  • Polymer surface activation and bonding without adhesives