High Precision EUV Optics for Metrology and Inspection
Thales SESO is a French manufacturer of state-of-the-art optics for space, semiconductor EUV equipment, lasers, and astronomy. We deliver highly freeform optics and opto-mechanical systems, all with sub-nanometer precision. The ultra-low surface roughness of our optics is a key enabler for the high-reflectivity EUV coatings needed for High Volume Manufacturing.
Our EUV collectors, illuminators, and imaging mirrors are integrated into metrology and inspection instruments used in leading semiconductor fabs and research laboratories today.
Multi-Mirror Assemblies
Motorized alignment
Common Frame Vibration optimized
Gravity sag compensated
Thermally stabilized holder