Creative Technology Corporation
Cutting-edge Electrostatic Chucking System with Sensor
Creative Technology Corp. have been manufacturing and developing Electrostatic Chucks (ESC) and Heater with own developed sensor for Semiconductor process. CT Corp. has over 20 years experience in the semiconductor industry and supplies to device makers across the globe including Japan, Taiwan, Korea, China, Europe, Singapore and the USA. CT Corp. also actively keeps up with next-generation technologies including chucking system for etching, CVD, PVD, TSV Litho with capacitance sensor, chucking system for end effector without vacuum, multi-zone heater and so on.