Ulvac GmbH

Klausnerring 4
Kirchheim b. Munchen, 
Germany
http://www.ulvac.eu
  • Booth: B1139


ULVAC, solution Provider for Deposition/Etching/Ashing/Impl.

ULVAC GmbH was established in 1987 as the European subsidiary of ULVAC, Inc. Headquartered in Munich, Germany. From Munich our sales and service team serve EMEA region. ULVAC provides a very broad portfolio of manufacturing equipment for the vacuum, materials, and thin film industries. ULVAC’s solutions diversely incorporate equipment, materials, analysis, and services for semiconductors, MEMS, flat panel displays, electronic components, PCB, TFB. ULVAC delivers all types of vacuum products such as vacuum pumps and measurement and analysis equipment. ULVAC offers state-of-art products and technologies for semiconductor and related processes. To support MEMS, power devices, NVM fabrication ULVAC offers a line of sputtering, evaporation, plasma etch, ashing equipment, ion implanting, oxidation/POA/Nitridization, and activation annealing for both R&D and manufacturing. ULVAC has developed systems dedicated to advanced processing for thin film, lithium-ion battery manufacturing. This equipment range includes discrete (single) substrate battery fabrication for sputtering and evaporation. Come by our booth and discuss your processing needs with our sales professionals

 Products

  • Entron-EXX - Sputtering System
    Advancing semiconductor scaling using cutting edge technology Single and Tandem Platforms Maximize Productivity per unit space Up to 12 process modules...

    • Applications:
    Pad / RDL, Novel Channel Materials, 
    EUV / Multi Patterning HM,
    Stress Tuning Spacer, Barrier / Seed
    Advanced Logic
    DRAM
    NAND/NVM
    Packaging
  • ENVIRO Optima Resist Strip (Ashing) System
    Best in Class Ash Rate...

    • Descum/HDI/Polymer Residue removal
    Single wafer ashing with one, two or three modules
    100-300 mm wafer size
    240 WPH throughput
    Equipment front end module (EFEM) with
    4 integrated load ports
    RF downstream plasma with >12 µ/min ash rate
    Microwave source (option)
    Cold plate (option)
  • uGmni 200/300
    Common core platform for PVD, CVD, Ash, Etch ...

    • Applications:

    • Power device: Seed & Metal layer Sputtering
    • MEMS sensor: PZT Sputtering & Etching
    • Optical Device: VCSEL Etching
    • Packaging: Descum Ashing

Categories

201 Flat Panel Display Equipment
  • Alignment Film Coating Equipment
  • Anodic Oxidation Equipment
  • Color Pattern Processing Equipment
    • 202 Other Equipment
  • Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
    • 203 Inspection & Measurement Products
  • Film Thickness; Thickness; Uniformity Measurement; Ellipsometer
  • Leak Detection Systems - Vacuum or Gas
    • 204 MEMS Equipment
  • Deep RIE etching; Dry Etching
    • 205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 206 PV Equipment
  • Thin Film
    • 207 Process Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion Implantation Equipment
  • Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
    • 300 Packaging and Assembly Materials
  • Molding; Encapsulation; Potting; Resin Materials
  • Thin Film; Dielectric Film Materials
    • 307 Process Materials
  • Deposition/Target Materials
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants
    • 401 Sub-systems
  • Power Supplies; RF Generators; Converters; Electrical Conditioning
  • Pumps, Vacuum
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Gas Monitoring Equipment; RGA's; TGO compliance
    • 901 Printed, Organic, Flexible and Large Area
  • Equipment: Printing, coating
  • Equipment: Roll to roll
  • Equipment: Systems
  • Equipment: Vacuum deposition
    • 904 Electronic Applications
  • Energy Efficiency: Power electronics
  • Healthcare: Device Implants
  • Healthcare: sensors
  • Lighting: LED
  • Lighting: OLED

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