Wooptix® has developed a system for wafer metrology, Phemet®, that uses WFPI, a proprietary wavefront sensing technique, that measures the topography of a silicon wafer from a single image, enabling the characterization of warpage, bow, and other relevant metrics. By collecting more than 16 million data points with sub-nanometer height resolution, Phemet® is the industry leader in speed and resolution. Wooptix´s systems for wafer inspection and metrology offer the data needed by chip manufacturers to enhance yield through comprehensive traceability in their progressively complex manufacturing procedures.
Phemet® provides the automation capabilities for in-line metrology of 300mm wafers, having a high throughput that allows for the use of its data in feed-forward algorithm or other customized control methods.
Wooptix Systems empower corporations to swiftly identify, address, and track deviations, ensuring heightened quality control for enhanced device performance.