YOUR FAB'S PARTNER
Eumetrys invites you to discover equipments exclusively distributed in Europe to match your needs in a changing environment: Secure your Fab's production
EQUIPMENTS:
Particle inspection (Laser Scanning) YGK system for unpatterned wafers. SILICON wafers, SILICON CARBIDE, COMPOUND SURFACE INSPECTION. OPAQUE and TRANSPARENT SUBSTRATES. Substrates like Si; SiC; GaN, LT; LN; Sapphire; Glass from 3” to 8” in diameter or square automatically.
ETAMAX: Exclusive photoluminescence mapping systems
ISTE: Leading edge FOUP cleaning equipments
TOHO : Nanometrics ECV pro, FLX (Thin film stress equipments), HL9900 (Hall effects), TS3100 (Film thickness measurement)
ROBOTICS:
Overhaul, standard exchange, buy-out services. State-of-the-art repair services with Delexon, ISO9001. Critical robots handled: ATR8, ATR7, AQR7, ASYST21, MAG7, MTR5, DBM2407, PRI, BROOKS, RORZE, YASKAWA, SANKYO, ISEL
Robots, controllers, and prealigners for silicon, compound and glass wafers
SUPPLY:
Parts and consumables for different areas: CMP, PVD, CVD, ETCH, DEPOSITION, IMPLANT, WET, CLEAN, METROLOGY, LITHOGRAPHY, Hook-up
Heating jackets, CMP consumables, and upgrades, Etch gaskets, SEZ chucks, O’rings, bearings, ESC chucks