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Watty Corporation

西五反田7-18-2
品川区,  東京都  141-0031

Japan
http://www.watty.co.jp
  • Booth: C1366

 Products

  • Heat exchanger (WEX) S/M/L　High efficiency heater
    ・Ultra high purity gas supply/heating for semiconductor/FPD manufacturing ・Optimal for supplying atmosphere gas for heat treatment furnace ・S size flow rate 10l~L size flow rate 100l, operating temperature 300°C...

    • 【Heat Exchanger Features】

    1、A clean structure using only EP tubes.
    ・Contact parts such as fittings and piping are all stainless steel (SUS316L).
    ・The heated gas is heated without touching the heater surface. It is heated in a clean state while being transferred in a clean pipe.

    2、Small size, light weight and high efficiency.
    ・Making the product into a series, we have a lineup that can be used with a maximum flow rate of 100 L/min. and at up to 300°C.

    3、Thermocouple and thermostat are standard inclusions.
    ・Temperature control and consideration for overheat protection are also standard. Wiring connection is simple.

    4、Inlet/outlet joints can be changed
    ・ Standard fitting is UJR 1/4 Female size.
    ・ It corresponds to the inlet/outlet size of 1/4 to 1/2 size.

    Specification

    Type

    S type

    M type

    L type

    WEX-S* -2*

    WEX-S* -3*

    WEX-M* -2*

    WEX-M* -3*

    WEX-L* -3*

    Heatable fluid

    Inert gas

    Maximum operating temperature

    200℃

    300℃

    200℃

    300℃

    300℃

    Rated flow

    〜10L/min

    〜50L/min

    〜100L/min

    Rated capacity

    130W

    190W

    400W

    560W

    1300W

    Maximum operating pressure

    0.5Mpa

    Standard fitting

    UJR "1/4 female

    UJR "3/8 Female

    Gas-contacting material

    SUS316L (WEP specification)

    Leak rate

    1 × 1010Pa・㎥/sec Less than

    Power supply

    AC100 or AC200

    thermocouple

    K type class 2

    thermostat

    Disk type

    Block type

    Disk type

    Block type

    Block type

    Main body dimensions（H×W×D）

    75×75×98

    96×102×128

    125.5×100×115

    155.5×130×145

    178×150×165

    Body weight

    Approximately 1kg

    Approximately 1.2kg

    Approximately 2kg

    Approximately 2.3 kg

    Approximately 4kg

    Connection method

    Connector removal

    Lead wire 2 m

    Connector removal

    Lead wire 2 m

    Connector removal

    Standard accessories

    ※1

    ※4

    ※2

    ※5

    ※3


    ※1 Thermo / power connector x 1 K thermocouple connector x 1 Mounting bracket x 1
    ※2 Thermo / power connector x 1 K Thermocouple connector x 1 Mounting bracket x 2

  • Hi-Watty Light（Standard goods）
    〈 Features 〉 ・Pure Japan-made general-purpose aluminum nitride heater ・Fast heating and cooling is possible. ・Low-cost. ・Short lead time...

    •  

    Heater structure

    In order to prevent any air layer from remaining inside the heater, integral sintering is performed using our proprietary production method. As a result, we have realized small heaters with large calorific values.

    Fast heating

    The combination of a high-melting point heating element and single-body sintering provides a heater capable of fast heating.

    Thermal shock tolerance

    Thermal shock tolerance is superior to alumina, used in common ceramic heaters.

    Temperature distribution

    By combining the high thermal conductivity of aluminum nitride (AlN) with a heater pattern design based on our know-how, uniform temperature characteristics can be realized.

    Standard goods

    Voltage (V)

    Power (W)

    Power density (W/㎠)

    Resistance value (at room temperature)

    Remarks

    □5

    12

    9

    36

    16

    □12

    100

    45

    30

    222

    200

    100

    70

    400

    □9×34

    100

    70

    23

    143

    200

    70

    23

    571

    □20

    100

    100

    25

    100

    200

    100

    25

    400

    □25

    100

    150

    24

    67

    200

    600

    96

    67

    100V common

    □40

    100

    200

    12.5

    50

    200

    800

    50

    50

    100V common

    □50

    100

    400

    16

    25

    200

    1600

    64

    25

    100V common
     
  • Heat exchanger (WEX) SS/UL　High efficiency heater
    〈Features〉K thermocouple, thermostat, exterior insulation standard equipment SS：280g Lightweight and ultra-small gas heater with palm size orless Flow rate 1 to 5 L/min 250 °C UL：UL499 compatible FileNo,E478998 Flow rate 10 L/min 200 °C compatible...

    • ＜Specification＞

    〇midget-type WEX₋SS

    ◆Size：70mm×32mm×42mm

    ※Excluding heat insulation materials and piping

    ◆Operating temperature:250°C

    ◆Rated flow rate：1~5L/Min

    ◆Rated capacity：140W(AC100Vor200V)

    ◆Temperature sensor：K thermocouple

    ◆Overheating prevention：With thermostat

    ◆Exterior insulation：Mantle(Stop with magic tape)

    ◆weight：280g

    〇WEX-UL-S2-S(UL compatible)

    ◆Size:98mm×75mm×75mm

    ◆Operating temperature：200°C

    ◆Rated flow rate：10L/Min

    ◆Rated capacity：130W

    ◆Temperature sensor： K thermocouple

    ◆Excessive temperature rise prevention:：With thermostat

    ◆Weight：1000g~

    ◆UL499 compatible　FileNo,E478998

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