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Edwards Ltd.

Pudong, Shanghai,  Shanghai 
China
http://www.edwardsvacuum.cn
  • Booth: E1201

Edwards is in the business of vacuum science.

Overview

Edwards is a leading manufacturer of sophisticated vacuum products and abatement systems and a leading provider of related value-added services for the manufacture of semiconductors, flat panel displays, LEDs and solar cells and a leader in vacuum technology for industrial, pharmaceutical, chemical, scientific, process, glass coating and food packaging industries as well as a wide range of R&D applications. Edwards has over 3,300 full-time employees and over 600 temporary workers operating in approximately 30 countries worldwide engaged in the design, manufacture and support of high technology vacuum and exhaust management equipment. Edwards’ American Depositary Shares trade on The NASDAQ Global Select Market under the symbol EVAC. Further information about Edwards can be found at www.edwardsvacuum.cn.


  Products

  • iXH MK2 系列
    干式真空泵...

  • —适用于严苛制成,拥有卓越的可靠性和更低的客户使用成本。


    XH系列干泵是引领严苛制成能力的全新标杆产品,采用模块化设计,可满足当今一切工艺,如PECVD、ALD Hi-k、 PECVD Low-k、SACVD、SiN、TiN、Epitaxy、GaN等严苛半导体制造工艺。

    • 低功耗,严苛制程能力
    • 服役寿命长
    • 环境影响小

    功能和效益:

    • 采用创新泵密封技术,延长服役寿命,降低泄露风险。
    • 采用Xcede技术,增强了耐腐蚀性。
    • 大幅提高了粉末处理能力,搭载创新Gas Buster™技术。
    • 新型Varimode 气体模块,优化了氮气吹扫能力。
  • iXM 系列
    低能耗干式真空泵...

  • 专为绿色制造而生的全新系列干泵。


    • 功率低
    • 服役寿命长
    • 环境影响小

    工艺:

    • 导体刻蚀
    • 金属刻蚀
    • 高密度等离子-化学气相沉积
    • 等离子体增强化学的气相沉积
    • 快速热处理
    • 聚合/氧化物扩散
    • 离子注入
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