Edwards is a leading manufacturer of sophisticated vacuum products and abatement systems and a leading provider of related value-added services for the manufacture of semiconductors, flat panel displays, LEDs and solar cells and a leader in vacuum technology for industrial, pharmaceutical, chemical, scientific, process, glass coating and food packaging industries as well as a wide range of R&D applications. Edwards has over 3,300 full-time employees and over 600 temporary workers operating in approximately 30 countries worldwide engaged in the design, manufacture and support of high technology vacuum and exhaust management equipment. Edwards’ American Depositary Shares trade on The NASDAQ Global Select Market under the symbol EVAC. Further information about Edwards can be found at www.edwardsvacuum.cn.
—适用于严苛制成,拥有卓越的可靠性和更低的客户使用成本。
XH系列干泵是引领严苛制成能力的全新标杆产品,采用模块化设计,可满足当今一切工艺,如PECVD、ALD Hi-k、 PECVD Low-k、SACVD、SiN、TiN、Epitaxy、GaN等严苛半导体制造工艺。
功能和效益:
专为绿色制造而生的全新系列干泵。
工艺: