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Suzhou Supermag Intelligent Technology Co.,Ltd.

Suzhou City,  Jiangsu Province 
China
http://www.supermag.com
  • Booth: 1575

Supermag Maglev Bearingless Technology at Booth 1575 Hall N1

Overview

Suzhou Supermag Intelligent Technology Co., Ltd.

SUPERMAG provides high-end Maglev Bearingless equipment based on its advanced Maglev Technology. SUPERMAG proposes industry solutions for semiconductor, bioprocessing, chemical, and energy by providing high-purity, low-shear force, leakage-free, and high reliability Maglev Bearingless Motors, Maglev Fluid Transport Systems, and Maglev Stirring Systems.

SUPERMAG Maglev Wafer Rotation System is applied in Oxidation, Diffusion Annealing, Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), MOCVD, Single Wafer Cleaning, Etching, Spin Coating, and other semiconductor manufacturing processes. SUPERMAG Maglev Bearingless Pump System is applied in semiconductor manufacturing processes such as the wet cleaning process, CMP, electroplating, etc. SUPERMAG Maglev Stirring System is applied in manufacturing processes such as stirring and mixing of highly sensitive fluids, etc.

SUPERMAG contributes to developing the maglev technology solutions to help the process equipment upgrading and innovation. 

Learn more at SUPERMAG Booth 1575, Hall N1 at SEMICON CHINA 2024.

  Products

  • SUPERMAG Maglev Wafer Rotation System
    Wear-free, no mechanical seals, No particle generation. Wildly applied in Oxidation, Diffusion Annealing, RTP, RTA, MOCVD, Single Wafer Cleaning, Etching, Spin Coating, and other high-end chip manufacturing processes....

    • SUPERMAG Maglev Wafer Rotation System, is designed for holding and rotating wafers in semiconductor equipment. It is applied with advanced integrated control technology for maglev bearingless motors. It can be applied in high-end chip manufacturing processes such as Oxidation, Diffusion Annealing, Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), MOCVD, Single Wafer Cleaning, Etching, Spin Coating, etc. There is wear-free, no mechanical seals and no particle generation. The hollow ring rotor is easy to customize and install. SUPERMAG Wafer Rotation System provides high cleanliness and reliability. It also offers the optimal solution for rotary motion in manufacturing processes with high cleanliness requirements. 
  • SUPERMAG Maglev Bearingless Pump System
    Highly Pure, low-shear force, wide flow range, and all pulsation-free. It also has a significantly intelligent control system and a small footprint. It can be applied in the wet cleaning process, CMP, electroplating, etc....

    • SUPERMAG Maglev Bearingless Pump System can be applied in semiconductor manufacturing processes such as the wet cleaning process, CMP, electroplating, etc. It is based on advanced active magnetic levitation; the pump impeller levitates in the fluid, wear-free, no particle generation, low-shear force, and low particle shedding. The intelligent control system and real-time adjustable speed can guarantee a stable flow and pressure. It is the optimal solution for high-purity fluid transport in high-end chip manufacturing.

  • SUPERMAG Maglev Stirring System
    SUPERMAG Maglev Stirring System is highly pure and low-shear force. It can be used to mix low-shear force-sensitive biologics or Macromolecular protein solutions while producing mRNA vaccines, gene therapies, or other high-end biopharmaceutical products....

    • SUPERMAG Maglev Stirring System is applied to produce mRNA vaccines, gene therapies, and other high-end biopharmaceutical products. The maglev impeller is levitated in the fluid; it is Wear-free and has low-shear force; it can mix the fluid rapidly. Meanwhile, it is pure and gentle with substantially high reliability and uptime. It can perform excellently while dealing with high-viscosity fluid by maneuvering the maglev impeller precisely.

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