Boyue Instruments (Shanghai) Co., Ltd.

STYLUS PROFILOMETER

Dektak Pro

Proven technology, enhanced performance

Building on 55 years of surface measurement innovation and technology leadership, Dektak Pro™ sets a new standard for stylus profilometer performance. The system uniquely delivers the highest quality data with unrivaled ease of use.

This 11th-generation Dektak® system combines:

• Unmatched accuracy and better than 4 Å repeatability
• Accelerated measurement and analysis speed
• A suite of Bruker-exclusive versatility and ease-of-use features

Only Dektak Pro provides the latest stylus profilometry advances and reliability needed to support your cutting-edge research and industrial applications well into the future.

FEATURES

Still Driving Stylus Profiling Innovation 55+ Years Later

Over the last five decades, Bruker's Dektak systems have led the industry in stylus profiling technology, achieving milestone improvements in resolution, stability, speed, and versatility. Now, Dektak systems are well-established as the gold standard of stylus profilers; when an accurate, trustworthy stylus profiler is needed, Dektak has long been the unquestioned solution.

Dektak Pro takes the next step forward in stylus profiling innovation, providing even more enhanced operability, reliability, and measurement accuracy to enhance and extend the qualities that make Dektak synonymous with stylus profiling.

Maximizing Repeatability and Accuracy

Dektak Pro delivers accurate, precise data with the highest resolution, lowest noise floor, and easiest tip exchange of any commercially available stylus profilometer. State-of-the art measurement and analysis technology maximizes repeatability and accuracy, making single-nanometer step height measurements and better than 4 Å repeatability possible.

Enhancing Throughput

Every step of the measurement and analysis process is accelerated with Dektak Pro. Direct-drive scan stage technology reduces time between scans, and 64-bit parallel processing in the Vision64^® software enables fast data processing.

Additional speed and ease-of-use technological advancements in Dektak Pro:

·    A new algorithm     brings nearly the entire field of view into focus in the optical live     image, making it easier to locate features of interest.

·    New step height     algorithms automate analysis routines, improve consistency, and minimize     potential user error in step height calculations.

Providing Ultimate Versatility and Ease of Use

Suited to widely diverse applications

Dektak Pro addresses R&D, process development, and QA/QC present and future needs across a host of industrial and research applications, such as: 

·    Microelectronics

·    Thick film coatings

·    Biomaterials

Accurate and responsive in dynamic measurement scenarios

With Dektak Pro, one measurement head covers 5 nm–1 mm step heights and 0.03–15 mg loads (with N-Lite+ option) without recalibration. The low-inertia sensor (LIS 3) rapidly adapts to sudden changes in surface topography and maintains accuracy and responsiveness in dynamic measurement scenarios

Fast and easy stylus replacement

Dektak Pro’s unique self-aligning stylus assembly facilitates quick and easy stylus exchange while eliminating any potential mishaps during the process. Bruker offers the widest range of stylus sizes to accommodate nearly any application requirement.

探针式轮廓仪/台阶仪 - Dektak Pro

技术成熟、性能增强

Dektak Pro 

       Dektak Pro™ 以其多功能，使用的便捷性和准确的精度在薄膜厚度、台阶高度、应力、表面粗糙度和晶圆翘曲测量方面广受赞许。第十一代Dektak®系统，具有4 Å重复性的优异表现，并提供200毫米平台选项，在科研以及工业领域中可以为材料的表面形貌提供各种分析。在表面测量方面，Dektak Pro是微电子技术、薄膜与涂层和生命科学应用的理想选择。

更准确的精度

       在探针式轮廓仪测量中，探针针尖沿表面移动，获得沿轨迹每个点的高度信息，从而实现高分辨率的表面形貌分析。探针式轮廓仪测量因其高精度和低成本而广受认可，新研发的技术进步进一步提高了速度和多功能性，以满足精密工程应用不断变化的需求。

强大的性能和重复性

       Dektak Pro以其强大的分辨率、稳定性、稳健性和耐用性，确保在未来数年甚至数十年内提供可靠的优质结果。新型号在Dektak平台上继承创新，提供更高的分辨率、更低的噪声和更便捷的探针更换，所有这些因素对于优化系统的重复性和准确性至关重要。

       在适当的环境下，Dektak Pro甚至能够测量1纳米的台阶高度，并在1微米台阶高度标准上实现优于4 Å的重复性。

性能体现在细节之中

       Dektak Pro的单拱设计有效降低了对不利环境条件（如噪声和震动）的敏感性，同时又可容纳大尺寸样品测试。新一代的智能电子技术应用更大限度地减少了温度变化和电子噪声，从而减少了高精度测量中的误差和不确定性。

       低惯量传感器（LIS 3）使系统能够快速适应表面形态的突然变化，在动态测量场景中保持准确性和响应性。探头更换技术通过自对准探头夹具，消除了错位和系统重新校准的需要，轻松完成探头更换，耗时不到一分钟。

快速获取结果

       Dektak Pro采用直驱扫描平台技术，这一先进的扫描平台技术大大减少了测量的时间而不影响分辨率和噪声底，从而加快了3D形貌或长轮廓扫描的结果获取速度，同时保持优异的数据质量和重复性。

       Vision64®软件采用64位并行处理技术，即使面对大数据也能实现快速的数据处理。此外，自动化的多次扫描分析操作简化了重复性任务，增强了速度和便捷性。

更简便的操作

       数据收集在Bruker的Vision64软件中进行，该软件具有简化的图形用户界面，结合了智能架构、直观的可视化工作流程和丰富的用户自定义自动化功能。Dektak Pro进一步改善了数据收集体验，具体体现在：

●     更小的光学畸变，使整个视野都保持清晰聚焦，方便快速定位感兴趣测试位置

●     单一测量头可覆盖1 nm至1 mm的台阶高度和1至15 mg的负载（在N-Lite+模式下可低至0.03 mg），无需重新校准

●     简单的操作员图形用户界面，用于自动化测量设置并简化操作

扩展您的分析能力

       Vision64中的数据分析器通过数据过滤、自动调平、自动台阶检测和recipe能力，使分析变得更加强大而简单。

•     台阶高度

       Dektak Pro强大的新台阶高度算法为各种复杂的表面轮廓测量提供可靠且全面的结果。其自动化分析程序还能够更大限度地减少了用户对台阶高度计算的影响，提高了数据解释的一致性和客观性。

•     表面粗糙度和波纹

       Dektak Pro提供了一种高性价比且用户友好的解决方案，以高精度量化表面粗糙度、纹理和波纹度。多种探针规格、用户可定义的探针力（1–15 mg，使用N-Lite+可低至0.03 mg）和可达1mm的垂直测量范围使得在各种表面上的测量成为可能。

•     2D应力测量

       借助Dektak Pro，用户在2D应力分析中拥有强大的控制力。通过用户定义的异常点去除和拟合边界，可以实现更可重复、更高精度的应力测量。

•     晶圆翘曲测绘和3D应力测量

       准确评估由膜应力引起的变形对于开发可控工艺和制备高质量器件至关重要。Dektak Pro准确测量可能导致变形、开裂和层间剥离的膜应力。

全面的应用环境

       Dektak Pro 满足研发、工艺开发以及当前和未来质量保证/质量控制（QA/QC）的需求，适用于多种工业和研究应用，包括：

•  微电子

   监测沉积和刻蚀过程

   测量器件和传感器高度

   评估沟槽深度

•  薄膜与涂层

   验证眼镜上的UV/硬化涂层

   优化水龙头/配件上的装饰涂层

   分析油漆或墨水涂层厚度

•  生命科学

   分析生物材料的厚度

   评估生物传感器的表面形貌

   表征微流体通道

HANDHELD XRF SPECTROMETERS

TRACER 5

Portable XRF for cutting-edge researchers

Elemental Analysis with Handheld X-ray Fluorescence

While the TRACER 5 has the ability to completely control the current and voltage, it also adds many new features which have been requested by our users. The user can select filters from the integrated filter wheel or insert user-designed filters. In addition, the measurements can be made in air, vacuum or helium atmosphere, which can be selected based on the needs of the user. The detector configuration and a small distance between the sample and detector make for a very sensitive system with some of the lowest detection limits available today. The TRACER 5 has approximately three times the sensitivity of the previous generation TRACERs, with helium purge TRACER 5 is the only handheld XRF that can elements as light as fluorine.

Features of the TRACER 5 family:

• 50kV-4W Rh target X-ray source
• Large area graphene window SDD detector
• Selectable measurement spot size 3 mm or 8 mm
• Helium purge and optional portable vacuum pump
• 5 position automatic filter changer
• Manual filter / secondary target option
• Integrated processor and data storage
• Interactive touch screen display
• Internal sample camera
• Wi-Fi and USB connectivity
• EasyCal software package for empricial user calibration

TRACER 5 Benefits at a Glance:

• SDD detector with 1um Graphene window for the ultimate light element performance
• Measurement atmosphere options for even more sensitivity: Air, vacuum or Helium flush
• Excitation filters: User designed manual filters and integrated 5 position filter wheel
• Internal camera for exact aiming
• Live spectra directly on the TRACER 5 and on PC
• PC Connectivity: Wi-Fi or wired USB
• User controlled current and voltage: achieves maximum sensitivity)

布鲁克Bruker 科研级手持式XRF分析仪

Tracer 5g

      Tracer 5g是布鲁克的一款科研级手持式XRF分析仪，搭载了全新的测试平台，能够让用户根据实际需求自主控制激发条件，同时提供定制化功能，能够结合用户在实际使用中的不同需求，以获取更准确的检测结果，非常适用于考古艺术、地质勘探、食品安全检测、植物与土壤检测、材料科学、半导体工业等应用。

      用户可通过交互式触摸显示屏实现激发源电流和电压的直接控制。除选择设备随机配置的多种滤片外，用户还可以插入自主设计的滤片以获得更优的测试效果。此外，Tracer 5g还支持根据测试的不同需求，选择在空气，真空或氦气三种不同测试环境中对样品进行测量。

      Tracer 5g采用厚度1μm的石墨烯窗口探测器取代了传统的8μm铍窗口探测器，以确保在整个光谱范围内具有更高的X射线透射率，独特的SharpBeam™几何光路设计，使样品和探测器之间的距离更短，对于轻元素的检测灵敏度更高，检出限更低。

设备特点：

更广泛的元素检测范围:

TRACER 5g作为一款先进的科研级的手持式XRF分析仪器，具备更广泛的元素检测范围，既可分析像氟(F)一样轻的元素，也可分析到(U)这样的重金属元素，为科学研究生产应用提供更强大的支持。

更高的灵敏度和更低的检测限：

TRACER 5g的拥有比一般的手持式X射线光谱仪更高的检测灵敏度和更低的检测限。

• 钠(Na)的灵敏度提升约3倍
• 镁(Mg)的灵敏度提升约2倍
• He测试条件下Na检测限为300 ppm
• He测试条件下Mg检测限为100 ppm
• 可检测到氟(F)

新一代1μm石墨烯窗口SSD探测器：

更高的X射线透射率，更高的灵敏度和检测精度。

SharpBeam™几何光路结构 ：

• 轻质元素的检测灵敏度显著提高
• 明确定位测量点
• 更大限度地减少X射线散射的检测

检测环境：

能够根据需求调整检测环境，可选空气、真空、氦气，确保检测结果的准确性。

内置相机：

可用于查看待测样品当前的状态，并通过比对投影到样品图像上的参照线，精确选择待测样品的测试点位置

可更换的准直器：

设备配置了3 mm和8 mm两种不同尺寸光斑的准直器，用户也可根据实际需求使用自主设计的准直器来选择合适的光斑大小。

完备且专业的软件系统

Tracer 5g配备有Atrax™、Easycal™、Bruker Toolbox等专业软件，功能齐全，使用方便。

• Atrax™能够帮助用户件对谱图进行可视化分析，进行样品元素组成定性定量分析。这一可视化的光谱分析软件使用户都能够随时了解待测样品中各元素的相互作用。
• EasyCal""软件能够为TRACER 5g创建和修正校准曲线。用户可通过这个软件来校准和调整仪器上的校准曲线，也能够根据自身样品的测试需求来重新定义校准曲线，以涵盖用户关注的元素和浓度范围等。
• Bruker Toolbox能够通过WiFi或者USB将设备与PC互联，使设备和PC能够直接传输数据，还具有报告生成，维护牌号库等功能。

Micro-XRF Spectrometer

M4 TORNADO

2D Micro-XRF with Ultimate Speed and Accuracy

The Instrument of Choice for Highly Sensitive and Non-Destructive Element Analysis
       The M4 TORNADO is the tool for sample characterization using small-spot Micro X-ray Fluorescence (Micro-XRF) analysis. Optimized for analysis speed and without compromising accuracy it measures a wide range of samples, whether small or large, even or irregularly shaped and generates a wealth of information on composition and element distribution.Equipped with a large high-speed stage it supports 2D analysis of virtually any kind of inorganic, organic and even of liquid sample.
       Providing spot sizes down to 25 μm (for Mo Kα radiation), excellent spatial resolution is warranted. The proven ESPRIT analysis software provides a flexible measurement setup and a variety of evaluation and processing tools. A large vacuum sample chamber supports light element detection.
       The instrument can be customized to provide extended measurement ranges or even higher analysis speed: flexibility can be enhanced through installation of a second tube with a different target and a collimator. An optional second SD detector increases speed even further.

The Variety of Application Fields:

·  Analytical performance
The analytical performance of Micro-XRF instruments is defined by several parameters. Some of the most important aspects of this analytical technique are explained considering the example of the M4 TORNADO. 
·  Distribution analysis of electronic components
Electrical and electronic equipment can contain toxic elements like Cr, Br, Cd, Hg or Pb. Limits are regulated by directives such as RoHS and WEEE. Compliance testing as well as monitoring the product quality can be easily done with the M4 TORNADO.
·  Analysis of solar cells
The efficiency of solar cells depends on their chemical composition and physical structure. In most cases the absorber of thin film cells is produced from CIGS-layers, which are Cu-In-Ga-Se or Cu-In-Ga-S compounds. Micro-XRF is ideal for R&D and quality control to check composition, thickness and homogeneity of these layers. 
·  Life science application – analyzing Daphnia
Daphnia are planktonic crustaceans. Because of their small size of 0.2 to 5 mm and their jumpy swimming style, they are also known as “water fleas”. The M4 TORNADO is well suited for heavy element analysis on biological samples like these. 
·  Particle analysis
It is often important to analyze small particles with regard to their composition to determine their origin. Here, two different examples are described: wear debris from an engine and inclusions in plastics.
·  Analyzing geological samples
Geological samples are inhomogeneous. The distribution analysis of their different constituents is important for understanding geological processes, exploration of mineral resources, and other applications.
·  Coating analysis
Low-alloy steel is highly sensitive to corrosion. This is the reason why parts and structures made of this steel are often protected by a Zn or a ZnAl coating. Here we look at analysis results of differently treated steel samples to better understand corrosion processes.
·  Examining corrosion processes of low-alloy steel
Low-alloy steel is highly sensitive to corrosion. This is the reason why parts and structures made of this steel are often protected by a Zn or a ZnAl coating. Here we look at analysis results of differently treated steel samples to better understand corrosion processes.
·  Archaeometry – examination of a Roman sword
Archaeometric objects are unique and very fragile, therefore a non-destructive analysis, like Micro-XRF, is the method of choice in learning more about such an object without damaging it.

微区X射线荧光光谱仪

M4 TORNADO

     Bruker M4 Tornado 微区X射线荧光光谱仪可用于对大块、不均匀、不规则，甚至小件的样品和包裹物进行高灵敏度、非破坏性的元素分析 (Na11-U92) ，是研究样品成分分析、成分分布规律的新利器，可以给学者从宏观、微观、微宏观结合等多个角度提供新的研究思路。

      采用多导毛细管聚焦镜将激发光聚焦到非常小的区域 (<20um) ，以获得良好的空间分辨率，进行元素成像分析。不同类型的样品都可以通过简单的样品制备甚至不制备直接进行分析。设备输出高精度的元素分布图分辨率可高达4000万像素，7168*5582 pixels。

高性能微区XRF，具有市场领先的分析速度和功能多样性
M4 TORNADO 是使用小光斑微区 X 射线荧光进行样品表征的首选设备。其测量结果能够提供样品的相关成分和元素分布的信息，甚至样品表面下元素分布信息。Bruker微区X射线光谱仪经过优化，可对任何类型的样品的点、线和二维区域扫描（Mapping）进行高速分析; 样品类型可为固态，液态，颗粒等。

靶材产生的X 射线经过多导毛细管聚焦后，在保证荧光强度的同时可产生极小的光斑。M4 TORNADO 可选配多个Bruker XFlash 硅漂移探测器 （SDD），可在不影响能量分辨率的情况下实现荧光信号的高吞吐量处理。

M4 TORNADO 还可额外选配第二根X 射线光管，它提供了不同的靶材以及准直器，可实现设备分析功能的极大拓展。

其他可选高级配置选项：

• He吹扫能够极大提高轻元素检测灵敏度，使得设备可在样品仓常压下对轻元素检测
• 可快速更换的地质样品测试支架，适用于矿物薄片和岩芯测试
• XMethod 软件，支持用户自主建立包含镀层在内的多样定量分析方法
• 用于矿物分析的AMICS 软件

M4 TORNADO 如何支持您的分析？

测量时间短。优化的 X 射线光路、高通量探测器、"On-the -fly" mapping ，单点测试时间可低至 1 ms。

测量样品高达 7kg。大型真空样品仓，可自由调节真空度，最低可至2mbar，自动He或N2吹扫，可检测含水样品中的轻元素。

单次面扫描面积高达 190 x 160 mm2 的面积。单次扫描多达 4000万像素点 。数据存储为HyperMap，包含所有像素点光谱信息以及光学图像。

定量分析单点，线扫描，面扫描测试结果。配置的基本参数方法，可选的XMethod软件包，实现对镀层等样品的准确定量。

处理数据。强大的分析软件，可在面扫描结果中选择任意对象（椭圆，矩形，多边形）进行光谱提取，线扫描数据提取，最大像素光谱，相分析。

扩展功能。可结合用户实际需求提供定制化配置，以满足您的分析需求。

3D OPTICAL PROFILOMETER

ContourX-200

Flexible benchtop for surface texture metrology

The ContourX-200 Optical Profilometer provides the perfect blend of advanced characterization, customizable options, and ease of use for best-in-class fast, accurate, and repeatable non-contact 3D surface metrology. The gage-capable, small footprint system offers uncompromised 2D/3D high-resolution measurement capabilities using a larger FOV 5 MP digital camera and new motorized XY stage. Boasting unmatched Z-axis resolution and accuracy, the ContourX-200 provides all the industry recognized advantages of Bruker’s proprietary white light interferometry (WLI) technology without the limitations of conventional confocal microscopes and competing standard optical profilers.

Uncompromised, Best-in-Class Metrology

Built upon over four decades of proprietary WLI innovation, the ContourX-200 optical profilometer exhibits the low noise, high-speed, accuracy, and precision results that quantitative metrology requires. With the use of multiple objectives and integrated feature recognition, features can be tracked over a variety of fields of view and at sub-nanometer vertical resolution, providing scale-independent results for quality control and process monitoring applications in very diverse industries. ContourX-200 is robust in all surface situations from 0.05% to 100% reflectivity. New hardware features include an innovative stage design for larger stitching capabilities and a 5MP camera with a 1200x1000 measurement array for lower noise, larger field-of-view, and higher lateral resolution.

Widest Application Analysis Capabilities

Utilizing powerful VisionXpress and Vision64 user interfaces, the ContourX-200 offers thousands of customized analyses for productivity in labs and on the factory floors. Bruker’s new Universal Scanning Interferometry (USI) measurement mode provides fully automated, self-sensing surface texture, optimized signal processing while delivering the most accurate and realistic computation of the surface topography being analyzed. The larger FOV provided by the system’s new camera and flexibility afforded by the new motorized XY stage enables more flexibility and higher throughput for a broad range of samples and parts. The hardware and software combine to provide streamlined access to top optical performance, completely outclassing comparable metrology capabilities.

布鲁克三维光学轮廓仪

ContourX-200

高效能白光干涉仪，配备自动XYZ样品台、查找表面功能、拼接及大范围成像功能。

ContourX-200 光学轮廓仪具有强大的表征能力，支持可选定制配件，使用方便，是一款测量准确、可重复性高的非接触式光学三维表面计量系统。设备设计简约，占用空间小，配置了大视场的5百万像素摄像头和新型电动XY载物台，具有强大的二维/三维高分辨测量能力。

ContourX-200 拥有出色的 Z 轴分辨率和精确度，具备布鲁克专有的白光干涉（WLI）技术广受业界认可的所有优势，而且不存在传统共聚焦显微镜和同类普通光学轮廓仪的局限性。

更高性能的表面计量能力

•      与放大倍率无关的卓越Z轴分辨率

•      更大尺寸的标准视场

•      稳定集成防震设计

 卓越的测量与分析功能

•      易于使用的界面，可快速准确地获得结果

•      自动化功能，更适用于日常测量和分析

•      广泛的滤镜和分析工具选项，用于粗糙度和关键尺寸测量分析

•      满足包括ISO 25178, ASME B46.1, ISO 4287等标准在内的定制化分析报告

卓越的计量技术

基于超过 40 年的 WLI（白光干涉技术） 自主研发成果，ContourX-200 光学轮廓仪能够满足定量计量所需的低噪声、高速、准确度和精确度等需求。通过使用多种物镜和特征图案识别功能，设备可以在多种视野内以亚纳米垂直分辨率来跟踪特征，从而提供不受放大倍数影响的结果，可用于各种不同行业中的质量控制和过程监控应用。

稳定性能和创新的硬件设计

ContourX-200 在反射率 0.05% 到 100% 的表面情况下都能发挥稳定性能。创新的硬件设计环境，包括为获取更大拼接而创新设计的工作台，5百万像素摄像头，采用1200x1000 测量阵列，能够实现低噪声、更大视场和更高横向分辨率。

广泛的应用分析能力

全新的通用扫描干涉（USI）测量模式可提供全自动、自感知表面纹理、优化信号处理等功能，同时对所分析的表面形貌执行准确的计算。

系统的新型摄像头提供了更大的视野，新型电动XY平台提供了更灵活定位能力，为各种样品和零件提供了更大的适用性和更高的测试通量，使ContourX-200能够在软硬件上进一步的有效结合，展现了卓越的光学性能和强大的计量分析能力。

先进的操作和分析软件

ContourX-200采用强大的 VisionXpress™ 和 Vision64 分析软件，具备更易于使用的界面和简洁的功能，提供超过千种的定制分析参数，可访问多种预编程滤镜和分析工具，适用于精密加工的表面，如薄膜、半导体、眼科、医疗设备、MEMS和摩擦学等领域的测量分析，有效提升实验室或工厂的效率。