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ClassOne Equipment

Decatur,  GA 
United States
https://www.classoneequipment.com/
  • Booth: 516

Overview

ClassOne Equipment is a unique company that has been serving the global semiconductor industry since 2002, and today we offer customers a very broad selection of semiconductor tools, upgrades, parts, and more. All delivering high quality at very attractive prices.

 

We offer a broad array of Used, Fully refubished, and NEW semiconductor equipment. – Our focus is on quality and customer service.  We support our NEW and Refurbished equipment with factory trained engineers, a broad array of parts, and the ability to upgrade many systems.  Our primary expertise includes Plasma Etch/PECVD, Lithography, Metrology, and Wet Process equipment from several OEMs.


  Products

  • Takano WM-7SR
    Modern technology solution for particle measurement on ≤200mm bare and blanket-filmed wafers...

  • Key Features & Benefits

    • Advanced performance and superior cost-effectiveness
    • 79nm particle detection sensitivity (Standard)
    • 61nm particle detection sensitivity (Optional)
    • 60 WPH throughput
    • Reproducibility of detection: <1%
    • Windows 10 operating system
    • 405nm laser diode at low incident angle
    • Single open-cassette handler for 50-200mm wafers
    • HEPA-equipped Fan Filter Unit (FFU)
    • Signal tower
    • Streamlined data outputs
    • Extensive OEM parts and local service support, available long-term
    • Quality-manufactured in Japan
    • One-year OEM warranty
    • Professional Installation and Training
    • Local spare parts and factory trained service support

    Software/Hardware Options

    • 61nm High Sensitivity mode
    • Map overlay (Comparison) function
    • X-Y coordinate output
    • Auto-sensitivity correction
    • Haze measurement
    • SECS II communication
    • Auto-Save all data
    • Area count
    • Remote desktop
    • Film-specific PSL calibration

  • Takano WM-10R
    Modern technology solution for particle measurement on ≤300mm bare and blanket-filmed wafers...

  • Key Features & Benefits

    • Advanced performance and superior cost-effectiveness
    • 48nm particle detection sensitivity
    • Dual laser angle (Optional)
    • 70 WPH throughput
    • Windows 10 operating system
    • Long-life 405nm laser diode
    • Single or dual FOUP or open-cassette handler
    • Many options: Map Overlay, Haze Measurements, XY Coordinate Output, and more
    • Extensive OEM parts and service support, available long-term
    • Quality-manufactured in Japan
    • One-year OEM warranty

    Measurement Specifications

    • Maximum detection sensitivity: 0.048µm
    • Dynamic range: 0.048 – 5µm
    • Reproducibility of detection: ≤1%
    • Throughput: 70 WPH on 300mm wafers

    Software/Hardware Options

    • Dual-incident angle laser
    • Map overlay function
    • X-Y coordinate output
    • Auto-sensitivity correction
    • Haze measurement
    • GEM300 communication
    • Remote desktop
    • ULPA-equipped Fan Filter Unit (FFU)
    • Signal light tower
    • Bare and filmed PSL calibration wafers

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