Zygo Corporation

For more than 50 years, phase-shifting interferometry has been the technology of choice for high-precision surface form metrology instruments. These interferometers provide fast and reliable measurements of surface form error and transmitted wavefront of optical components, systems, and assemblies. From research environments to a wide range of industrial applications, laser interferometers offer high levels of data traceability for quality assurance and post-production analysis. They have become an integral part of the manufacturing process.

Zygo’s Qualifire represents a leap forward for laser interferometers by providing solutions to known challenges for instruments of this type.

Common to optical metrology in many modern systems, the Fizeau design uses a fixed, on-axis coherent point source to illuminate the interferometric cavity. For the most part, it works very well. While phase-shifting and fixed illumination remain the gold standard, Zygo is always looking for improvements and has explored the benefits of dynamic illumination with the new Flying Spot option.

Qualifire is available with either a 4-inch aperture or a smallest-in-class 6-inch aperture. Some Qualifire versions weigh less than 50 pounds (23 kg) making this instrument much easier to move—which is especially helpful when the test part cannot be brought to the instrument.

Another weight and spacing advantage is an internal Phase Measuring Receptacle (PMR). This eliminates potential damage to the PZT stacks inside the PMR when the unit is moved. Other improvements include easy-grasp handles and a convenient, easy-to-access On/Off switch.

In addition, the optical leg is sealed, providing additional protection for dust that accumulates over time and can add to artifacts in the system. This layout also makes service easier. Even the laser can be changed without disturbing any of the optical components.

Every facet of the trusted Zygo Verifire has been rethought with user experience and confidence in metrology in mind to bring you the new Qualifire product line.

The NewView™ 9000 3D optical surface profiler provides powerful versatility in non-contact optical surface profiling. With the system, it is easy and fast to measure a wide range of surface types, including smooth, rough, flat, sloped, and stepped. All measurements are nondestructive, fast, and require no sample preparation.

At the core of the system is ZYGO's Coherence Scanning Interferometry (CSI) technology which delivers sub-nanometer precision at all magnifications, and measures a wider range of surfaces faster and more precisely than other commercially-available technologies, thus optimizing your return on investment.

Flexibility is the hallmark of ZYGO's NewView products. The NewView 9000 profiler offers exceptional value with applications as varied as flatness, roughness and waviness, thin films, step heights and more.

All NewView 9000 profilers are equipped with a triple-zoom turret which can be populated with discrete zoom optics tailor made for the system. Sample staging configurations range from completely manual to fully automated with encoded travel.

Regardless of your configuration, all NewView 9000 systems offer high-accuracy measurements, ease of use, and fast measurements, all at an attractive price point that make it the ideal choice for versatility and value in 3D optical profilers.

The NewView 9000 profiler features an open work area, with clear lines of sight, to help make measurement setups and changeovers simple and quick. Systems can be equipped with a variety of sample staging that range from fully manual X/Y and tilt stages, to fully automated stages with 150 mm of travel and 4 degrees of tilt. With the integrated isolation system and compact size, it is well suited for benchtop installations; using the optional stand and workstation make an ideal production-style system.

Designed for the most demanding applications, the Nexview™ NX2 3D optical profiler combines exceptional precision, advanced algorithms, application flexibility, and automation into a single package that represents ZYGO's most advanced Coherence Scanning Interferometric (CSI) profiler.

The completely non-contact technology optimizes the return on investment by delivering sub-nanometer precision at all magnifications and measuring a wider range of surfaces faster and more precisely than other comparable technologies commercially available. With applications as varied as flatness, roughness and waviness, thin films, step heights and more on virtually any surface and material, Nexview NX2 truly is the no-compromise profiler.

As the latest generation flagship, Nexview™ NX2 provides a wide range of differentiated features targeted at making users' metrology better, faster, and more reliable:

• Large-area 1.9 MP sensor with high sensitivity lets you see more in a single measurement
• High-speed measurements take only seconds for improved productivity and process control
• Automated part focus and setup minimizes operator variability and training while reducing the time to data
• Gage capable performance through exceptional precision and repeatability for the most demanding production applications.
• Vibration robust metrology with SureScan technology and built in isolation enables high quality metrology even in vibration-prone environments
• SmartPSI™ technology for ultra-fast profiling of ultra-smooth surfaces
• 2D and 3D correlation provides confidence in your measurements with results that comply to ISO 25178 and ISO 4287 standards.
• Mx™ software for instrument control, analysis, and measurement automation
• True Color imaging for enhanced visualization
• Variable image zoom with three included zoom lenses lets users optimize the field of view and maximize instrument flexibility

You no longer have to select a profiler based on the type of surface you want to measure. The Nexview™ NX2 profiler measures topography of virtually any surface from a super polished optical surface with sub-Angstrom surface roughness, to steep machined angles up to 85 degrees. It does all this in 3D, without contact, and provides the best qualities of other profiling technologies (stylus, confocal, focus scanning) without their shortcomings.

Additional application modules for specific needs, such as measurement in the presence of transparent films, and 2D vision analysis, are available for customers that require these capabilities.

The Nexview™ NX2 profiler is a fly-by-wire tool with no manual controls, so it can be fully automated with programmed sequences to measure multiple areas of a surface, multiple parts in a tray, or larger surfaces by stitching together multiple measurements into a single measurement.

The Nexview NX2 profiler features a large work area with clear lines of sight to help make measurement setups and changeovers simple and quick.

Its automated 200 mm integrated measurement stage is the epitome of clean and efficient industrial design. It features an embedded ±4 degree high load tilt stage with parcentric correction – which makes aligning the measurement surface simple, even for featureless samples.