Parker Hannifin Corporation

The BDV Series diaphragm valve enables precise control of gas and liquid distribution in semiconductor manufacturing processes.

The BDV is a positive retraction diaphragm valve that features a flexible tied-diaphragm design to control flow of the media. When the valve is actuated, the diaphragm moves up or down. In the open position, the diaphragm lifts, allowing the media to flow. In the closed position, it seals against a valve seat, stopping the flow.

All BDV Series valves are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, all valve seals (seat and diaphragm) are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding ultra-high purity (UHP) applications.

Markets:

• Fluid & gas handling
• Process control
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Applications:

• Semiconductor Sub-Fab gas lateral systems
• Bulk Gas Delivery
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

Features and Benefits:

• Ideal for high-flow, low-pressure applications
• Standard surface finish of 10 micro inch Ra
• Fully functional from vacuum to 300 psig
• Minimal particle generation and gas entrapment
• Metal-to-metal external seal
• Tied diaphragm eliminates springs in wetted area and enhances safety
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• Internal leak rate: ≤ 2 x 10-10 scc/sec He
• Flow rate: 2.8

The FR Series come in FR1000, FR1200, FR1300, and FR1400 configurations. Please ask about choosing the right series for your application needs.

The FR Series offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. The new line complements our current, premium QR4000 Series regulators, and in combination, will serve a wide range of applications in semiconductor fabrication.

Markets:

• Semiconductor Manufacturing
• Gas Companies
• Analytical Laboratory
• Industrial
• Pharmaceutical
• BioPharm

Features/Benefits:

• Metal-to-Metal Diaphragm Seal assures high leak integrity
• Manufactured for ultra high purity gas delivery applications
• 10 μ inch Ra Surface Finish
• Passivated & Electropolished
• Integrated Filtration
• Hastelloy® diaphragm standard
• Flow capacity: 0.09 & 0.15 Cv

Applications:

• Tool Hook-Up
• Valve Manifold Boxes
• Process Gas Cabinets
• “Point of Use” pressure regulation

The 700 Series Bulk Facility Valve (with high flow bellows) offers superior performance and reliability in ultra-high purity (UHP) gas distribution and bulk delivery systems.

The 700 Series unique low-weight design reduces installation costs compared to valves of similar size and flow capacities on the market. It exhibits excellent leak integrity and gas containment capabilities, making it ideal for use in applications where process cleanliness is critical, including microelectronic manufacturing operations. The 700 Series Bulk Facility Valve provides a number of advantages over traditional ball valve designs, including minimal particle generation and lower internal and external leak rates. This reduces process gas contamination, which is essential to wafer/semiconductor production.

Valve materials of construction increase durability and resistance to process gas corrosion. Bodies are constructed from electropolished 316L Stainless Steel. Valve sizes 1.5-inch and larger utilize an Inconel 625 bellows, which provides superior strength and corrosion resistance, affording the 700 Series with maximum cycle life at operating pressures up to 375 psig. 700 Series Valves are built in a Class 100 cleanroom. 100% of the valves are inboard and across-seat Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:

• Semiconductor Fab
• Gas Companies

Features/Benefits:

• Lightweight design reduces installation costs
• Sizes up to 6-inches available
• Maximum operating pressure 375 psig (250 psig 1-inch size)
• Internal leak rate: 1 x 10-10 scc/sec He (rated)
• External leak rate: 1 x 10-10 scc/sec He
• Available in manual and air actuated (AOP) configurations
• Air actuated options available in 1-inch, 1.5-inch, and 2-inch sizes
• Inlet and outlet purge ports

Applications:

• Gas Cabinets