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Pfeiffer Vacuum (India) Private Limited

25/5 Nicholson Road, Tarbund, Secundearbad
Hyderabad,  Telangana  500009

India
https://www.pfeiffer-vacuum.com/global/en
  • Booth: H1X01


The ultimate product range for total fab solutions!

Pfeiffer Vacuum provides turbopumps, dry pumps, and measurement equipment for the following applications: PVD, CVD, lithography, etch and implant processes as well as for back end applications. For inspection and metrology applications, we provide low vibration vacuum solutions. Additionally, we offer leak detectors and solutions for Airborne Contamination Management (AMC).

Pfeifer Vacuum Valves & Engineering manufactures flanges, valves, fittings and chambers as well as custom components.
 

Pfeiffer Vacuum is part of the Busch Group, one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses three well-known brands: Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions.


 Press Releases

  •  The three companies of the Busch Group – Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions – announce their joint presence at Semicon India 2024.

    Maulburg, August 14, 2024 – The booth will showcase the combined competence of the three companies by presenting their wide range of vacuum solutions and technological expertise. This includes vacuum pumps, contamination management systems, leak detectors, valves, gas abatement solutions and comprehensive sub-fab management, all aimed at improving the infrastructure of Indian semiconductor manufacturing facilities. Under the headings "Ultimate Product Range" and "Total Fab Solutions", visitors can discover the Group's joint product portfolio. Rajat Sabharwal, General Manager of Pfeiffer Vacuum India, says: “India is progressively developing into a semiconductor manufacturing nation. The sector is growing steadily, and we are excited to contribute to this growth by providing not only our Total Fab Solutions but also state-of-the-art service support.” Mithun Chakraborty, General Manager of Busch Vacuum Solutions India, adds: “The Indian semiconductor sector is expected to reach a turnover of more than 100 billion US dollars by 2032 and is therefore also promoted by the Indian Government. This growth and the related government focus will enhance India's position in the global market, create jobs, foster innovation, and boost the economy. With its expertise and complete solutions, the Busch Group in India will be part of this development and support the country's burgeoning semiconductor industry.”

    Unmatched range of vacuum and abatement solutions

    ASM 392 mobile leak detector: With its integrated turbomolecular vacuum pump, the ASM 392 from Pfeiffer Vacuum is SEMI S2 compliant and optimized for rapid pump downs and short response times on large test objects. Its dry, frictionless backing pump and a powerful high vacuum pump make it ideal for testing in clean room environments.

    ATH 2804 M turbopump: With a compact footprint, Pfeiffer Vacuum’s ATH 2804 M magnetically levitated turbomolecular vacuum pumps provide high gas throughput and are ideal for semiconductor manufacturing processes.

    TORRI BD 0100 dry pump: TORRI BD from Busch Vacuum Solutions offer short pump down times for load lock chambers and are among the smallest, lightest and most energy-efficient dry multi-stage rotary lobe vacuum pumps on the market.

    CT-TW-H thermal abatement: The high-temperature thermal abatement system from centrotherm clean solutions will be showcased in a digital format. It combines the wide process coverage of flame abatement with the fuel-free aspects of plasma abatement, with lower operating costs and secondary emissions. Able to destroy the molecular process gas NF3 at class-leading levels with extremely low NOx emissions, the CT-TW-H finally delivers a sustainable solution with a minimal carbon footprint to the CVD and metal-etch process family.

    Trade show visitors can meet experts from Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions at Semicon India from September 11-13, 2024, in booth H1X01 at India Expo Mart (IEML), Greater Noida.

     

    Caption: Magnetically levitated turbopump from Pfeiffer Vacuum 

    About the Busch Group

    The Busch Group is one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses three well-known brands: Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions.

    The extensive product and service portfolio includes solutions for vacuum, overpressure and abatement applications in all industries, such as food, semiconductors, analytics, chemicals and plastics. This also includes the design and construction of tailor-made vacuum systems and a worldwide service network.

    The Busch Group is a family business that is managed by the Busch family. More than 8,000 employees in 44 countries worldwide work for the group. Busch is headquartered in Maulburg, Baden-Württemberg, in the tri-country region of Germany, France and Switzerland.

    The Busch Group manufactures in its 19 own production plants in China, the Czech Republic, France, Germany, India, Romania, South Korea, Switzerland, the United Kingdom, the USA and Vietnam.

    The Busch Group has an annual consolidated revenue of close to 2 billion Euro.

     Media Contact

    Sabine Neubrand
    Public Relations
    Pfeiffer Vacuum GmbH
    Berliner Straße 43
    D-35614 Asslar, Germany
    +49 (0)6441 802 - 1223
    www.pfeiffer-vacuum.com

    Ankita Pandey
    Associate Marketing Manager
    Busch Vacuum India Private Limited
    103, Sector 5, lmt Manesar
    Gurugram, Haryana 122050
    +911244751330
    www.buschvacuum.com

 Products

  • ATH 2804 M/ATH 3204 M turbopumps
    Compact, magnetically levitated turbopumps in the pumping speed class of 3,000 l/s...

    • High gas throughput and high temperature operation required in harsh applications
    • Tolerates exhaust pressure up to 3.4 mbar
    • Low vibration operation with an automatic out-of-balance compensation 
    • Compact foot print to save variable space in a tool
    • Integrated drive electronics for a wide range of applications
    • Simple installation and easy start-up
    • Energy saving – low electricity and cooling water consumption
  • HiPace 3400 IT turbopump
    Turbopump for high performance ion implantation...

  • Take your semiconductor manufacturing to new heights with our HiPace 3400 IT, the most compact and powerful turbopump designed exclusively for your demanding ion implantation applications.
    Compact with superior pump performance The HiPace 3400 IT sets the standard as the most compact turbopump in its class, ensuring optimal space utilization without compromising performance. The DN 320 flange size increases the pumping capacity for process gases up to an impressive 30 %.
    Process protection for extended uptime The unique bearing concept and specially coated rotor design protect both your process and the pump, providing unparalleled durability and reliability. Our proven pump design, coupled with an intelligent temperature management system,
    provides extended uptime and extended maintenance intervals. Keep your process running smoothly without unnecessary interruptions.

  • ASM 390/ASM 392 leak detector
    Mobile leak detectors optimized for rapid pump down and short response times on large test objects...

  • Superior performance, fast testing
    The ASM 390 and ASM 392 are the perfect leak detection solutions adapted to the semiconductor and display industries as well as to other demanding applications where rapid pump down and high sensitivity is key. Both models are fully Semi S2 compliant.
    These leak detectors are fitted with a dry frictionless backing pump and a powerful high vacuum pump, making them the ideal tools for leak testing of various components in clean environments. Equipped with an additional turbopump, the ASM 392 will speed up your leak detection process to reduce the downtime of your production equipment.

    Robust, accurate and reliable
    The ASM 390 and ASM 392 were developed to provide full confidence in leak testing regardless of the operator’s knowledge. They deliver premium performances and accurate results in a minimal time, making them highly efficient in the field.


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