DAIFUKU CO, LTD.

Komakihara 4-103
Komaki, Aichi 485-8653

Japan
http://www.daifuku.com

Booth: H1U21

Visit us to immerse yourself in the world of advanced AHMS!

＜About us＞

Daifuku is a leading global manufacturer of material handling systems, renowned for its extensive experience across a wide array of industries. Our technology, expertise, and system construction capabilities are highly esteemed by customers worldwide. In the semiconductor manufacturing sector, Daifuku has consistently provided the world's top semiconductor manufacturers with Automated Material Handling Systems (AMHS), which are crucial for cleanroom automation. Daifuku's AMHSs were the first in the world to achieve low particle emission, low vibration, and high reliability through non-contact power supply system. Furthermore, our unique technologies, such as nitrogen purging, address the demands for shrinking the size of semiconductors, significantly contributing to the production of cutting-edge products.

Press Releases

Under the theme Grab the Future with AMHS, Daifuku Co., Ltd. will be participating in SEMICON India 2024. (20240826)

Date: September 11-13
Location: India Expo Mart (IEML), Greater Noida, Delhi NCR
Booth: H1U21

Daifuku provides cleanroom automated material handling systems (AMHS) to semiconductor manufacturers around the world. Thanks to our industry-leading technology, our systems minimize particles, keep vibration levels low, and ensure the highest reliability in semiconductor manufacturing.

Please drop by our booth where our AMHS experts are at the ready to provide solutions to your semiconductor manufacturing needs. We look forward to speaking with you.

SEMICON India 2024 | Events | Solutions | DAIFUKU

Improving Reliability and Productivity with Daifuku’s Semiconductor Production Line Systems (20240826)

When it comes to semiconductor manufacturing, highly reliable transport and storage systems capable of operating 24 hours a day, 365 days a year are essential. We spoke with engineering and design staff representatives from Daifuku’s Cleanroom Division about Daifuku’s semiconductor production line systems such as the Cleanway, a cleanroom transport system for maximizing equipment uptime, and a nitrogen purge storage system that contributes to semiconductor miniaturization.

continued on our website →　https://www.daifuku.com/daifuku-square/article/000999/

Products

Overhead Hoist Transport (OHT)

An unmanned transport system composed of rails and vehicles, that is normally suspended from the ceiling. There are multiple variations to suit ones specific needs. OHT is the industry general term, with the Daifuku version being the Cleanway Series.... More Info Less Info

Our conventional vehicle model transports carriers such as FOUPs, containing 300 mm wafers through the Front end manufacturing process. A separate larger variation can transport panel level packaging, up to 600 x 600 mm, for the Back end of the mnufacturing process.

Stocker (STK)

A storage device to store carriers on a temporary basis. Several types exist to support most types of carriers used in the Front and Back end processes. STK is the industry general term, with the Daifuku product lineup being the Clean Stocker Series.... More Info Less Info

Our conventional model stores carriers called FOUPs, which contain the 300 mm wafers for the Front end manufacturing process. A separate model allows the storage of FOUPs for panel level packaging, up to 600 x 600 mm, for the Back end manufacturing process. A nitrogen purging function is available to prevent oxidation of the wafers/panels in the carrier.

Zero Footprint Storage (ZFS)/OverHead Buffer (OHB)

A shelf attached uder or beside the OHT rails to store a carrier temporarily. Generally, multiple are installed in clusters along the rails. Daifuku's product lineup consists of the ZFS (Zero Footprint Storage) and STB (Side Track Buffer) solutions.... More Info Less Info

Similar to our stocker solutions, our conventional models store carriers called FOUPs, which contain the 300 mm wafers for the Front end manufacturing process. A separate model allows the strorage of FOUPs for panel level packaging, up to 600 x 600 mm, for the Back end manufacturing process. A nitrogen function is available to prevent oxidation of the wafers/panels in the carrier.

Tower Lifter

An elevator to transport carriers between different floors. The Daifuku's product lineup is the Zip Tower Series.... More Info Less Info

Used in fabs composed of multiple floors where AMHS is required to transport carriers in between floors quickly.

Material Handling Control System (MCS)

An advanced application that manages the AMHS system, designating transfer instructions and ensuring smooth transport and delivery of carriers. MCS is the general term, with the Daifuku's pdocut being xMCS.... More Info Less Info

It is configured between OHT/STK and MES, and has a feature to send various commands from MES to corresponding transport device in a timely mannner, and sends reports from each transport device back to MES.

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