LINTEC Co., Ltd.

四谷4-30-14
服部ビル3F
新宿区,  東京都  160-0004

Japan
http://www.lintec-mfc.co.jp
  • Booth: H1U42


Welcome to LINTEC: Pioneering Fluid Control Excellence

A pioneer in fluid control technology

LINTEC is a Japanese company aiming to revolutionize the semiconductor industry by developing gas and liquid flow control, vaporization, and heat exchange technology.

LINTEC: Innovating Technology Since 1987

LINTEC specializes in pioneering fluid measurement and control technologies. Our commitment to Originality, Challenge, and Sincerity drives us to create cutting-edge mass flow controllers essential for semiconductor manufacturing worldwide. As we expand globally, we are focused on forging strong partnerships in Asia, North America. LINTEC invites collaboration and partnerships in India and beyond, aiming to pioneer new technological frontiers and deliver exceptional solutions worldwide.

We at Lintec aim to become one-of-a-kind company in the world with our own unique technologies.


 Products

  • Fast Response Mass Flow Controller(MC-7000 series)
    Ultra high-speed mass flow controller with response time of 200msec....

  • MC-7000 Series

    Achieves high-speed flow control of 200msec (typical) by using a thermal sensor. By using the Lintec’s unique non-contact, thermal flow rate sensor and piezo control valve, it’s possible to control the flow of corrosive gases with ultra-high speed.
    This product offers ±1.0% S.P. high accuracy flow rate control, and has DeviceNet or EtherCAT digital communication interface available for selection.

    Feature

    • Ultra high-speed flow control 200msec
    • Accuracy ±1%S.P.
    • Operating temperature 5 to 50°C
    • Metal seal
    • Clean (zero particle structure)
    • Ambient temperature sensor
    • EtherCAT communication
    • DeviceNet™ communication

    Example of Use
    High-speed etching process

    In semiconductor manufacturing process, there is a need to improve the throughput in parallel with miniaturization. Even for mass flow controllers that control the flow rate of reactant gases, there is an increasing demand for shorter flow rate control start (rise) times. The ultra high-speed mass flow controller [MC-7000] is a non-contact thermal flow sensor that does not contact the flow sensor and the flow measuring gas and achieving an ultra-high-speed response of 200 msec. Since it is a non-contact type, high-speed flow rate control is possible for measuring the flow rate of corrosive gases.

     

    Model MC-7100C MC-7200C MC-7100D MC-7200D
    Flow rate in Nitrogen(Full scale) 10 ~ 5,000SCCM ~20SLM 10 ~ 5,000SCCM ~20SLM
    Flow rate control range 2 ~ 100% F.S.
    Accuracy 100% F.S. ~ 25% F.S. ±1.0% S.P.
    25% F.S. ~ 2% F.S. ±0.25% F.S.
    Response time 0.2sec
    Operating differential pressure 50 ~ 300kPa Please check our catalog. 50 ~ 300kPa Please check our catalog.
    Temperature 5 ~ 50℃
    Seal materials SUS316L Au
    Digital interface EtherCAT® DeviceNetTM
  • EtherCAT® Mass Flow Controller (MC-5000C Series)
    MC-5000C Series: EtherCAT® interface-dedicated mass flow controller...

  • ■ Features
    ● EtherCAT digital interface in accordance with ETG
    ● LINTEC's unique ambient temperature-compensated sensor incorporated
    ● Highly functional upon installation of microprocessor
    ● Diaphragm valve with small dead volume
    ● High-speed and high efficiency piezoelectric actuator
    ● Long-term leak tightness ensured using metal seal
    ● By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises
    and electromagnetic field interferences

    Example of Use

    Communication Unification of EtherCAT Communication Devices

    EtherCAT communication (digital interface) is increasingly used in semiconductor manufacturing equipment for high-speed control of robot arms and other transport systems. 65,536 nodes are available for EtherCAT communication, enabling unification of all measurement and motion elements of the MFC with EtherCAT communication.

    Specification Table

    Model MC-5100C MC-5200C MC-5250C MC-5460C MC-5470C MC-5580C
    Flow rate in Nitrogen(Full scale) 5~5,000SCCM ~20SLM ~50SLM ~150SLM ~200SLM ~300SLM
    Flow rate control range 2 ~ 100% F.S.
    Accuracy 100~25% F.S. ±1.0%S.P.
    25%~2% F.S. ±0.25% F.S.
    100~35% F.S. ±1.0%S.P.
    35%~2% F.S. ±0.35% F.S.
    1% F.S. 2% F.S.
    Operating differential pressure 50 ~ 300kPa 100 ~ 300kPa 150 ~ 300kPa 250 ~ 500kPa 350 ~ 500kPa
    Temperature 5 ~ 50℃
    Seal materials Au
  • Variable Range MFC (MC-700 Series)
    A highly versatile mass flow controller with a variable range function that allows full scale range adjustment, and has digital communication (RS-485) and metal seal....

  • MC-700 Series

    Variable range function allows flow control at different setups with a single unit, which eliminates the necessity to use multiple MFCs and thus helps to reduce the spare parts’ number. This MFC is ideal for experimental tools which often require gas type and flow rate change.

    Feature

    • Variable function
    • Metal seal
    • RS-485 communication

    Option

    • RS-232 communication

      Example of Use

      Experimental equipment and prototypes

      Experimental and prototype tools are often required to control various gases at different flow ranges, so it’s necessary to have multiple mass flow controllers. The MC-700 series is a mass flow controller that comes standard with a VR function that allows you to change the gas type and flow rate, so it is ideal because it can accommodate multiple specifications with one unit and keep the costs down. In addition, the seal material is a metal seal which made with SUS-316L, making it compatible for highly corrosive gases’ applications.

    Specification Table

    Model MC-710 MC-720 MC-730
    Flow rate in Nitrogen(Full scale) 10 ~ 3,000SCCM ~ 10SLM ~ 50SLM
    Flow rate control range 2 ~ 100% F.S.
    Accuracy ±1.0% F.S.
    Operating differential pressure 50 ~ 300kPa 100 ~ 300kPa 150 ~ 300kPa
    Temperature 15 ~ 35℃
    Seal materials SUS316L
  • Low-cost Mass Flow Controller (MC-10 Series)
    Fast delivery and low price Viton™ seal mass flow controller....

  • MC-10 Series

    A low-cost mass flow controller ideal for controlling the flow rate of inert gases such as Ar, N2, etc. and controlling the flow rate of Air. Limited specifications enable quick delivery time.

    RS-485 digital interface and variable range function are available as options

    Feature

    • Low price

    Option

    • Variable function
    • RS-485 communication

    Example of Use

    PVD

    In PVD film deposition processes such as sputtering, Ar is generally used as an inert gas, a stable gas that is less likely to cause chemical reactions. If you need to control the flow rate of an  inert gas such as Ar, we recommend the low-cost mass flow controller MC-10RC.

    Inert gas analysis and experimental equipment

    We recommend the low-cost MC-10RC for applications that don’t require corrosive gases. Furthermore, with the VR function option, it is possible to change the gas type and flow range in-line. This product is ideal for simple experiments and analytical equipment.

    Specification Table

    Model MC-10RC MC-11RC
    Flow rate in Nitrogen(Full scale) 10 ~ 5,000SCCM ~ 50SLM
    Flow rate control range 2 ~ 100% F.S.
    Accuracy ±1.0% F.S.
    Operating differential pressure 50 ~ 300kPa 200 ~ 300kPa
    Temperature 15 ~ 35℃
    Seal materials Viton®
  • High Temperature Mass Flow Meter (MM-3000L-TN )
    The high temperature mass flow meter that can be used in environments with the maximum operation temperature of 120℃ (150℃ when not energized)....

  • MM-3000L-TN Series

    High temperature is possible by separating the wetted part and the circuit board part which is sensitive to heat.

    Feature

    • Operating temperature Max 120°C
    • Metal seal
    • Clean (zero particle structure)
    • RS-485 communication

    Option

    • Heater block

    Specification Table

    Model MC-3102L-TC MC-3202L-TC
    Flow rate in Nitrogen(Full scale) 10 ~ 5,000SCCM ~ 25SLM
    Flow rate control range 2 ~ 100% F.S.
    Accuracy ±1.0% F.S.
    Temperature L:80 ~ 100℃
    H:100 ~ 120℃
    Seal materials Au

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".