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SPS-Asia Technology Pte Ltd

10 Ubi Crescent
Ubi Techpark Lobby B, #06-18
Singapore,  408564

Singapore
http://www.sps-international.com
  • Booth: H3N22


Come visit us at booth H3N22

SPS-International operates as a manufacturer and stocking distributor of cleanroom process equipment, wafer handling tools, and wet chemistry and CMP consumables for the semiconductor industry, with offices in Europe, America, and Asia. The SPS team emphasizes providing customized solutions and fast supply logistics to its global customers (https://www.sps-international.com)

esPRO (https://www.esproflow.com)

Chemistry heaters, filtration, pumps, flow controllers, PFA fittings, and more for wet chemical handling

WHS (https://www.waferhandlingsystems.com)

Automation and manual wafer handling tools: wafer sorters, bulk wafer transfers, aligners, presenters, vacuum wands, and store/ship solutions

Sparetech (https://www.sparetech.com)

Spare parts and consumables: vacuum robot rebuilds, CMP membranes, pad conditioners, and upgrades for older systems

POLOS (https://www.sps-polos.com)

Lab equipment for R&D and universities: maskless photolithography laser writers, mask aligners, spin coaters, and hotplates

 Products

  • esPRO In-Line Chemistry Heater
    esPRO® Inline Heater uses a PFA insulated electrical resistive element heater. It is designed to safely heat acids, bases, DI water and other noncombustible liquids up to 180°C...

    • Create your own esPRO® Inline Heater!

    The esPRO® Inline Heater uses a PFA insulated electrical resistive element heater. It is designed to safely heat acids, bases, DI water and other noncombustible liquids up to 180°C. 

    This series of esPRO® Ultra-Pure Inline Heaters is designed for use in ultrapure environments and industrial fluid heating applications such as Semiconductor-, PCB-, MEMS-, Electronics-, LED-, Flat Panel-, Solar cell Manufacturing, Chemical Processing, Aerospace, Life Science industry and other applications which require the highest standards of purity. Constructed of PVDF or PFA materials, these heaters can be custom designed and built for use with deionized water, acids, and other diverse process chemistries. Our heaters are engineered and made in Germany.

    Features

    • High efficiency and purity
    • High reliability and low maintenance
    • Compact size for ease of installation
    • No nitrogen purge required
    • SEMI S3, CE and UL compliant
    • Power range: 1.0 - 40.0 kW
    • Ground wire with tantalum or platinum tip
    • Various types of temperature sensors available
  • SafeGuard Thin/Fragile Wafer Transfer
    Automated SafeGuard wafer transfer: 76mm to 200mm. Ideal for InP, GaAs, GaN, SiC wafers. Motorized 25-set arm protects edges, boosting yields...

    • Advanced technology automatic SafeGuard wafer transfer for 76 mm up to 200 mm wafers. Engineered for InP, GaAs, GaN and SiC compound wafer handling. Features motorized 25-set transfer arm assembly for gentle lifting of wafers – protecting the wafer edge from abrasion or shock to increase yields; touchscreen recipe software for standard operation and password protected service menu for motor, axis control, event logging. Thin and bonded wafer compatible. ISO 3 (FS209E Class 1) Cleanroom Compatible. SEMI Compliant High- and Low-Profile Cassettes
  • SPIN150x Spin coater - Standard
    Unique outer shell and drain design to switch between table-top and in-deck model in-field...

    • The POLOS® SPIN150x offers precise, repeatable process control. It is made from natural polypropylene (NPP) or optionally available in chemically resistant PTFE. This new version of the well-proven model comes in a standard and an advanced version. It is ideal for processing a wide range of substrates with a diameter of up to 150 mm or square samples with dimensions 100 x 100 mm.

    • Unique outer shell and drain design to switch between table-top and in-deck model in-field
    • Easy chamber access
    • Auto Lid
    • Liquid filter trap
    • Lid lock and vacuum sensor for user safety

Categories

200 Packaging and Assembly Equipment
  • Wafer Mount; Taping Equipment
    • 203 Inspection & Measurement Products
  • Flat; Notch Finding System
  • Instruments; Bench Top Test
    • 207 Process Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
  • Transfer Systems for Wafer; Reticles or FPD's
    • 304 Mask Making Materials
  • Mask and Reticle Handling Products
    • 307 Process Materials
  • CMP; Grind; Lap; Polish; Abrasive materials
    • 309 Test Materials
  • Probe Cards; DUT boards and other probing accessories (incl Ceramic and Special Purpose Probe Cards)
    • 400 Components, Parts & Accessories
  • Bearings; Shaft Collars
  • Filters for Liquid; Oil
  • Filters, Getters, Purifiers, Catalysts for Gases
  • Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
  • Heating elements; coils; insulation; vestibule blocks and other Furnace components
  • Motors; Fans; Electric Rotary Spindles
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants
    • 401 Sub-systems
  • Exposure; Illumination Sources - Laser; Lamp; X-ray & other
  • Handling; Transfer; Loading Systems; Lifting devices
  • Pumps, for Fluids
  • Pumps, Vacuum
  • Ultrasonic Generators; Transducer and Monitoring Systems
    • 502 Material Handling Systems
  • Robotics; Transfer Systems
    • 603 Simulation, Analysis; Modeling Software
  • Mask Making software & simulation
    • 701 Manufacturing Services or Consulting
  • Wafer Handling
    • 900 Support Products
  • Device; Wafer; Display Panel Handling Products
  • Garments ; Apparel
  • Laboratory Apparatus and Supplies
  • Tools

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