Evatec AG

Hauptstrasse 1A
Trübbach,  CH-9477

Switzerland
http://www.evatecnet.com
  • Booth: H3Q34


 Products

  • CLUSTERLINE® FAMILY
    CLUSTERLINE® are a family of platforms named according to their substrate size capability. All platforms share cluster architecture with cassette-to-cassette processing and fully automated handling....

  • Production solutions on CLUSTERLINE® cross all 6 Evatec core markets. Whatever your application, our specialists can help you configure an ideal CLUSTERLINE® platform for you. We deliver complete process solutions including highly aligned magnetic films, high performance piezoelectrics like AlScN for broadband RF filters and highly efficient energy harvesting devices, high aspect ratio TSV metallization in Advanced Packaging or precise deposition of TCOs and multilayer dielectrics for the latest micro LED and 3D filter technologies.

    More process capabilities, more configuration options and more productivity - Find out more about our CLUSTERLINE® FAMILY by watching our video

    • CLUSTERLINE® 200 : 200mm cluster platform with configuration options for single substrate or batch processing
    • CLUSTERLINE® 200 BPM : Want to improve process accuracy and repeatability? Want to reduce particles? From Micro LED to Edge Emitting Lasers and RF filters, CLUSTERLINE® 200 BPM gives you gold medal winning performance in thin film deposition. Watch the video
    • CLUSTERLINE® 300 : 300mm cluster platform with configuration options for single substrate or batch processing
    • CLUSTERLINE® 600 : FOPLP and IC substrate manufacturing on a cluster tool for panel handling up to 650 x 650mm
  • BAK EVAPORATORS
    With new levels of flexibility, and new levels of process control the BAK Evaporator is the industry leader in selected applications across Power Device, Wireless, LED, MEMS and Photonics applications....

  • There is a BAK thats suitable for everyone - from the compact BAK 501 for universities and research institutions to the BAV 2000, a production giant. Find out about the range ofdifferent configurations by visiting our website to the right or contact us for immediate help.

    FIND THE RIGHT BAK FOR YOU

    Step 1:  Check what system capacity you need: Start by selecting a basic platform size according to your substrate size and preferred batch capacity for standard calotte handling. Click here to view a capacity chart for different system sizes.

    Step 2:  Choose your sources, accessories and process control technologies: To take a quick look at our portfolio of sources and process accessories click here - from effusion cells and digital beam sweep electron beam guns, to chamber heating and plasma sources for PIAD. To read more about Evatec advanced process control technologies including quartz and optical monitoring click here

    Step 3: Customize your BAK according to your processes and fab integration requirements: Investigate further custom options to build a BAK that’s just right for you.

    • "Lift Off" platforms with extended throw for zero side wall coverage
    • "Split Chamber" platforms for sensitive source materials and reduced batch cycle times
    • Automated Handling options including single wafer transfer, assisted calotte load or full robot load or the calotte and transfer to the coating chamber from fontend cassettes

    Step 4: Benefit from Evatec's Unicalc Solutions: Whatever configuration you choose, all our BAK family members come with 50 years of process know-how. Evatec Unicalc solutions for shaper optimization at the smallest dimensions are a perfect way to increase deposition rates for higher throughput and reduce material usage for critical processes using precious metals. To find out more about Unicalc click here.

    Step 5: Read the BAK Family brochure here


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