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centrotherm clean solutions GmbH

Johannes-Schmid-Str. 3
Blaubeuren,  D-89143

Germany
http://www.centrotherm-cs.de
  • Booth: H1X01

Technology Excellence for a better tomorrow

centrotherm clean colutions, now united with Busch Vacuum Solutions and Pfeiffer Vacuum under the umbrella of the new Busch Group, is a leading global supplier of equipment and technology for the treatment of gaseous, liquid, and solid pollutants with the goal of protecting the environmental health and safety of others. Customer satisfaction is the most important benchmark for us. We successfully treat the most difficult abatement processes worldwide. with more than 60 years of providing our customers with sustainable exhaust gas solutions, we have the expertise you need for your abatement challenges. From large volume VOC treatment to PoU treatment for Semiconductor, PV, FPD, LED, and R&D, we have the perfect solution. Engineered and manufactured in Germany with support locations worldwide.

 Products

  • Thermal Gas Treatment
    Product Description In thermal gas treatment, harmful gases are broken down at very high temperatures and scrubbed in the downstream wet stage. We have three different thermal systems using different fuel source in our product portfolio....

    • Burner-Wet Scrubber CT-BW

    • Fuel source: CH4, Propan, Hydrogen…etc
    • High destructive and removal efficiency (DRE)  – especially for climate-damaging PFCs
    • Reliable disposal of dusty and gaseous by-products
    • Safe and resource-saving operation under challenging process conditions

    Plasma-Wet Scrubber CT-PW

    • Fuel source: Plasma source
    • Suitable for waster gas treatment from CVD and etching processes
    • Reliable disposal of dusty and gaseous by-products

    Thermal-Wet Scrubber CT-TW

    • Fuel source: electric heater
    • Reliable disposal of flammable waste gases and gaseous by-products
    • Low installation costs (no fuel gas and oxygen required)

  • Wet Scrubber CT-W
    In the wet scrubber, water-soluble harmful substances in the waste gas are washed out and transferred to the liquid phase....

    • Suitable for treating waste gases from various applications including etching and EPI processes
    • Efficient and cost-effective treatment of HCl, HF, SiH2Cl2, SiCl4 and NH3 along with other acidic and alkaline waste gases
    • Low operating costs due to minimal fresh water consumption
  • Dry Bed Absorber CT-D
    In the dry bed absorber, harmful gases are converted into non-volatile, inorganic solids that are permanently bound to the granules....

    • Easy installation and requires only electricity and compressed air or nitrogen for the operation.
    • Dry bed absorber as a passive system ensures continuous disposal of waste gases even in the event of a power failure.
    • Granules specifically developed for semiconductor and photovoltaic applications guarantee safe disposal of harmful gases.
  • Filter Systems CT-PF
    The particle filter system is a field proven technology for the semiconductor photovoltaic industries. It effectively captures fine dust, reduces significantly the expenditure for cleaning of the facility exhaust and provide for dust-free air....

    • High performance filters with a removal efficiency of > 99,95% for fine dust
    • Automatic cleaning of filter elements during operation
    • Low operation and maintenance requirements, very service friendly

Categories

500 Factory Monitoring & Control Systems (FMCS)
  • Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers)

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