Evatec AG

With new levels of flexibility, and new levels of process control the BAK Evaporator is the industry leader in selected applications across Power Device, Wireless, LED, MEMS and Photonics applications. There is a BAK thats suitable for everyone - from the compact BAK 501 for universities and research institutions to the BAV 2000, a production giant. 

Find out about the range of different configurations by visiting our website or contact us for immediate help.

CLUSTERLINE® are a family of platforms named according to their substrate size capability. All platforms share cluster architecture with cassette-to-cassette processing and fully automated handling. Production solutions on CLUSTERLINE® cross all 6 Evatec core markets.

Whatever your application, our specialists can help you configure an ideal CLUSTERLINE® platform for you. We deliver complete process solutions including highly aligned magnetic films, high performance piezoelectrics like AlScN for broadband RF filters and highly efficient energy harvesting devices, high aspect ratio TSV metallization in Advanced Packaging or precise deposition of TCOs and multilayer dielectrics for the latest micro LED and 3D filter technologies.

Visit our website to learn more about our CLUSTERLINE® 200, CLUSTERLINE® 300 or CLUSTERLINE® 600.

System design for the lowest Rc in the industry

HEXAGON is a dedicated wafer level packaging platform for volume production in applications like FOWLP at the lowest cost of ownership offering atmospheric pressure degas, etch and metal deposition.

• Processing of highly outgassing organic passivated wafers
• Atmospheric frontend handling with a high-performance dual end effector robot for the shortest wafer swap times
• Wafer transfer by synchronous indexer enables high speed wafer processing
• Etch shield kit lifetimes of > 20000 wafers with enhanced uptime and reduced maintenance
• Footprint less than 11 square metres (without control racks)
• System design for lowest Rc in the industry and best wafer to wafer repeatability

Find out more about HEXAGON on our website.

SOLARIS® sputter platforms combine the know-how from delivering over 5000 high speed optical disk systems with experience gained from over 3000 semiconductor PVD tools to deliver a new approach in thin film mass production. With their "inline" architecture, SOLARIS® platforms are designed for "fully automated fabs" increasing throughput and eliminating manual handling. From Touch Panels to EMI Shielding, Thermoelectric Generators, Power Devices and Photovoltaics, the S151 and S380 platforms offer flexible high speed manufacturing solutions for rigid and flexible substrates.

Visit our website to find out more about SOLARIS® S151 or SOLARIS® S380.

The LLS EVO II is a versatile batch sputtering system with a vertical, dynamic concept for up to 5 different materials and separation between load and process chamber (LC, PC). It accommodates any substrate size and shape up to 200 x 230mm. An installed base of over 300 tools worldwide has shown the tool to be reliable and robust production platform. Its flexibility, compact design and lower investment costs make it an ideal choice for smaller volume production alongside the larger single substrate processing tools in Evatec's product portfolio.

The tool can be equipped with configurable power supplies for high process flexibility. Substrate degas and etch in load chamber ensure high purity processes in the process chamber while easy conversion to various substrate sizes within 5 minutes make the LLS a flexible production tool.

To download the LLS EVO II brochure click here or learn more on our website.