UHP Specialty Gas Delivery System:
•Delivery system layout
•Specialty Gas delivery equipment – BSGS, GC/R, VMB/P, LDS design and layout
•Scrubber system design and provide equipment
•Piping design, installation and inspection
•Equipment operation monitoring system design, installation and test
UHP Bulk Gas Delivery System:
•Delivery system layout
•Purification room design and provide equipment
•On-line gas continuous quality control (CQC) system design and provide equipment
•Piping design, installation and inspection