Evatec AG

<p><span style="color:rgb(33,37,41);"><span style="background-color:rgb(231,234,235);float:none;font-family:Roboto, sans-serif;font-size:16px;font-style:normal;font-weight:400;letter-spacing:normal;text-align:left;text-decoration-color:initial;text-decoration-style:initial;text-decoration-thickness:initial;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;">With new levels of flexibility, and new levels of process control the BAK Evaporator is the industry leader in selected applications across Power Device, Wireless, LED, MEMS and Photonics applications. There is a BAK thats suitable for everyone - from the compact BAK 501 for universities and research institutions to the Multi BAK 1401 for large volume manufacturing.  </span></span></p>... More Info Less Info

<p style="background-color:rgb(231,234,235);color:rgb(33,37,41);font-family:Roboto, sans-serif;font-size:16px;font-style:normal;font-weight:400;letter-spacing:normal;margin-bottom:1rem;margin-top:0px;text-align:left;text-decoration-color:initial;text-decoration-style:initial;text-decoration-thickness:initial;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;">CLUSTERLINE® are a family of platforms named according to their substrate size capability. All platforms share cluster architecture with cassette-to-cassette processing and fully automated handling. Production solutions on CLUSTERLINE® cross all 6 Evatec core markets.</p><p style="background-color:rgb(231,234,235);color:rgb(33,37,41);font-family:Roboto, sans-serif;font-size:16px;font-style:normal;font-weight:400;letter-spacing:normal;margin-bottom:1rem;margin-top:0px;text-align:left;text-decoration-color:initial;text-decoration-style:initial;text-decoration-thickness:initial;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;">Whatever your application, our specialists can help you configure an ideal CLUSTERLINE® platform for you. We deliver complete process solutions including highly aligned magnetic films, high performance piezoelectrics like AlScN for broadband RF filters and highly efficient energy harvesting devices, high aspect ratio TSV metallization in Advanced Packaging or precise deposition of TCOs and multilayer dielectrics for the latest micro LED and 3D filter technologies.</p>... More Info Less Info

<p style="background-color:rgb(0,85,165);color:rgb(255,255,255);font-family:Roboto, sans-serif;font-size:16px;font-style:normal;font-weight:400;letter-spacing:normal;margin-bottom:1rem;margin-top:0px;text-align:justify;text-decoration-color:initial;text-decoration-style:initial;text-decoration-thickness:initial;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;">The LLS EVO II is a versatile batch sputtering system with a vertical, dynamic concept for up to 5 different materials and separation between load and process chamber (LC, PC). It accommodates any substrate size and shape up to 200 x 230mm. An installed base of over 300 tools worldwide has shown the tool to be reliable and robust production platform. Its flexibility, compact design and lower investment costs make it an ideal choice for smaller volume production alongside the larger single substrate processing tools in Evatec's product portfolio.</p><p style="background-color:rgb(0,85,165);color:rgb(255,255,255);font-family:Roboto, sans-serif;font-size:16px;font-style:normal;font-weight:400;letter-spacing:normal;margin-bottom:1rem;margin-top:0px;text-align:justify;text-decoration-color:initial;text-decoration-style:initial;text-decoration-thickness:initial;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;">The tool can be equipped with configurable power supplies for high process flexibility. Substrate degas and etch in load chamber ensure high purity processes in the process chamber while easy conversion to various substrate sizes within 5 minutes make the LLS a flexible production tool.</p>... More Info Less Info

<p><span style="color:rgb(33,37,41);"><span style="background-color:rgb(231,234,235);float:none;font-family:Roboto, sans-serif;font-size:16px;font-style:normal;font-weight:400;letter-spacing:normal;text-align:left;text-decoration-color:initial;text-decoration-style:initial;text-decoration-thickness:initial;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;">SOLARIS® sputter platforms combine the know-how from delivering over 5000 high speed optical disk systems with experience gained from over 3000 semiconductor PVD tools to deliver a new approach in thin film mass production. With their "inline" architecture, SOLARIS® platforms are designed for "fully automated fabs" increasing throughput and eliminating manual handling. From Touch Panels to EMI Shielding, Thermoelectric Generators, Power Devices and Photovoltaics, the S151 and S380 platforms offer flexible high speed manufacturing solutions for rigid and flexible substrates.</span></span></p>... More Info Less Info