Ebara Technology Incorporated is a subsidiary of the Ebara Precision Machinery Company, a global leader in advanced vacuum, abatement, and semiconductor manufacturing solutions. As part of the EBARA Group, the company develops and supplies innovative technologies that support the production of semiconductors, flat panel displays, photovoltaic devices, and other advanced electronic products. Its portfolio includes dry vacuum pumps, turbomolecular pumps, point-of-use abatement systems, chemical mechanical polishing (CMP) equipment, filtration technologies, ozone-related systems, and plating equipment.
Through continuous innovation, Ebara Precision Machinery Company helps customers improve manufacturing efficiency, reduce energy consumption, lower operating costs, and meet increasingly stringent environmental requirements. Its solutions are designed for critical semiconductor processes such as etch, deposition, diffusion, ALD, and other advanced manufacturing applications. The company also provides comprehensive lifecycle support, including installation, maintenance, rebuild services, parts cleaning, and technical field support through a global service network.
With decades of experience and thousands of installations worldwide, Ebara Precision Machinery Company is committed to delivering reliable, high-performance solutions that enhance productivity, maximize equipment uptime, and enable the next generation of semiconductor manufacturing technologies.