Sonic Corporation

Tachikawa,  Tokyo 
  • Booth: 5224

Welcome to Sonic’s booth at SEMICON JAPAN 2016 exhibition.

At SEMICON JAPAN 2016 Sonic Corporation will highlight its 2 newest ultrasonic liquid micro flowmeters that have outstanding characteristics would be the best precise measurement solution for semiconductor manufacturing equipment.


  • μLF-300 ultrasonic liquid micro flowmeter
    μLF-300 is the newest ultrasonic liquid micro flowmeter that has the round shaped in-house design sensor and signal converter in its compact body....

  • The sensor has multiple spurious and integrated powerful signal processer enables much precise calculation for acquiring delta T time difference than conventional calculation method. μLF-300 has outstanding characteristics such as ± 0.2% reproducibility, ±1% RD measurement accuracy and responds fast every 10msec cycle. Integrated high durable PFA straight tube, digital communication interface would be the best to embedded use for the flowrate measurement in the semiconductor manufacturing system. (W) 102mm x (H) 60mm compact design also enables easy handling to installation.

  • μLF-300S ultrasonic liquid micro flowmeter
    Same as μLF-300, μLF-300S is the newest sensor-separate ultrasonic liquid micro flowmeter that has outstanding characteristics such as ± 0.5% RD measurement accuracy....

  • μLF-300S has high durable PFA straight tube , RS422/485 digital communication interface and 4-20mA analog interface . Separated converter enables wide variety of installation to existing equipment as a replacement purpose. μLF-300S is the best measurement solution for particularly car paint shop, bottling and chemical application.

 Additional Info

初出展/New Exhibitor
新製品/New Products
製品展示/Displaying Equipment
デモンストレーション/ Product Demonstrations
産業・技術分野/ Industries/Technologies
上記以外の分野/Other categories