東京インスツルメンツ

  • 小間番号3021

欠陥検査用高分解能カソードルミネッセンス

About us

Tokyo Instruments is an authorized representative of Attolight, manufacturer of the only quantitative CL systems available as a research-grade tool and time-resolved capabilities or a wafer measurement tool.oluminescence for defect inspection

About Attolight

Attolight build high resolution cathodoluminescence microscopes to detect subsurface defects combined with nanometer scale mapping resolution. We have applications in detecting defects in III-V manufacturing, research & development and failure analysis.

The Internet of Things, Big Data, and Clean Tech rely heavily on performance and innovation in semiconductor materials and devices. We perform quality control during their development and production and help increase performance and accelerate innovation.

Markets

- Light Emitting Diodes (LEDs)

- Displays: Specialty LED and µLED structure

- Power & radio frequency devices (GaN, SiC)

- Photonics

- Materials characterization

Applications

- Defect Detection and characterization

- Composition metrology

- Doping metrology

- Failure analysis

- Nanostructure characterization

- Carrier dynamics (picosecond time resolved CL) & dynamic SEM


 追加情報

初出展/New Exhibitor
Yes
新製品/New Products
Yes
製品展示/Displaying Equipment
No
デモンストレーション/ Product Demonstrations
No
産業・技術分野/ Industries/Technologies
LED/solid state lighting, その他/Other, 太陽光発電(PV)/Photovoltaic, パワー半導体/Power Semiconductors, 半導体/Semiconductor