Integrated Dynamics Engineering GmbH

  • 小間番号1912


Active Vibration isolation, and Active EMI cancellation

IDE- アクティブ除振システム、ステージ専用アクティブアクティブ除振システム、磁場キャンセラーテクノロジー
IDE
はアクティブおよびパッシブ除振、アクティブ磁場補正、遮音等の環境制御システムを開発・製造する、世界的なリーダーです。IDEの提案は、リソグラフィ、計測、研究、医療技術における厳しい環境への効果的な改善性も多くの実績で証明されています。
特ステージ対応の専用アクティブ除振装置は高い制振性能を誇りながら、床及び定盤上発生する振動を効率よくキャンセルすることが可能であり、生産性と生産精度を高める同時に実現できる価値の高い提案ができます。IDEは品質の高いエンジニアリングチームを有することでOEMのお客様に対する性能特化した制振性・除振性を同時に叶える除振装置の提供が可能にします。
SEMICON
の業界と一緒に発展してきた長年の経験を生かし、挑戦する装置メーカの力強いサポーターとして存在が実績で証明されています。


 プレスリリース

  • IDE installed TAW isolators on a number of unique mask qualification systems for the world's largest semiconductor chip manufacturer in recent months. Here, the IDE TAW systems met, without compromise, all the of the customer’s stringent X, Y, and Z requirements. 

    In the past years, several distinguished microscope brands have selected the TAW for highly dependable performance, joining a long list of satisfied users. The TAW is considered by many to be the primary vibration isolation system for CD-SEMs, E-beam lithography, ultra-sensitive semiconductor tools and sophisticated inspection equipment. Today, the TAW continues to meet the ever-increasing demands of IDE’s world-class customers, The TAW system is installed on the concrete floor of a fab or lab. The platform height is leveled to the same height as that of the raised floor. TAW platforms are typically 1.5 m (5 ft.) wide, 2 m (6.5 ft.) long, and 400 mm (1.5 ft.) high. They can accommodate equipment up to 6,000 kg (12,150 lbs.). Now setting a ten year record of exceptional performance, IDE’s TAW vibration isolators are specifically designed, fully certified, and continuously upgraded for cleanrooms worldwide. The system has been proven countless times to deliver highly optimized passive and active isolation. A decade of data readily supports IDE’s TAW leadership in vibration isolation for cleanrooms. The trend continues.

    Further Reading... 

  • IDE’s ATAN active vibration isolation modules considered the ideal solution for high-throughput semiconductor manufacturing and metrology equipment. Continuing a decades-long tradition of developing innovative active vibration isolation solutions for the global semiconductor and metrology industries, Integrated Dynamics Engineering (IDE) is now highlighting its state-of-the-art series, ATAN - a hybrid suite of active vibration isolation modules. These have been engineered to accommodate a broad range of stage mass acceleration and payload capacities. This new series of ATAN modules is yet another example of IDE’s dedication to providing extraordinary, highly flexible isolators that meet, or even exceed, the demands of today’s ever-expanding global OEM applications. The ATAN active vibration isolation solution incorporates a complex hybrid isolation technology which provides outstanding floor vibration control and an order of magnitude improvement for stage settling times. Typical settling performance achieved has been below 50 msec for today’s 2G + stages. Currently, there are three size/capacity isolator options in the series: ATAN 500 - 2000 kg up to 6000 kg; ATAN 300 - 1000 kg up to 2500 kg; and ATAN 100 - 600 kg up to 1800 kg. According to Roland Kappel, IDE Director of Environmental Product Development “Our new ATAN modules are a primary example of IDE never losing its focus on global semiconductor manufacturing. IDE continues to develop unique vibration isolation solutions that make optimum results readily achievable in fabs worldwide.”

    Further Reading... 

  • Raunheim, Germany – Recently, the world record for achieving a 40.5 pm spatial high resolution on a sensitive JEOL scanning transmission electron microscope was achieved during daytime in the Institute of Engineering Innovation at Tokyo University, Japan.

    Normally, this procedure is only attempted at night when the surrounding environment is at its quietest, with no traffic, people, or machinery moving about.

    To achieve their goal, the Japanese team of scientists enhanced their scanning transmission electron JEOL microscope with a fifth-order aberration corrector that operated at 300 kV. The results in daylight shattered all records -- with a 40.5 pm spatial resolution never previously achieved in the fields of STEM and TEM technology. 

    Providing the fail-safe vibration isolation required on the sophisticated JEOL instrument - especially in daytime - was the highly advanced TCN300XNL system. This vibration isolation system was developed and installed by Integrated Dynamics Engineering (IDE), a world leader for over 25 years in vibration control. 

    The TCN300XNL provides low noise active floor vibration isolation at top performance levels. Among its many features are the lowest achievable residual floor vibration levels, high performance sensor signal resolution, an advanced FFF control algorithm, and low magnetic stray field. 

    “IDE is extremely proud of being able to make this world record possible at Tokyo University through the use of our TCN300XNL vibration isolation system on their record-breaking microscope,” commented Roland Kappel, Director of Product Development at IDE in Germany. 

    JEOL has been an avid client and collaborator with IDE for decades. 

    For more technical information please refer to the JEOL Website.


 出展製品

  • ATAN
    Active Vibration Isolation Modules supporting the highest throughput and productivity requirements for optical and e-beam inspection and metrology equipment....

  • IDE’s ATAN active vibration isolation modules considered the ideal solution for high-throughput semiconductor manufacturing and metrology equipment.

    Continuing a decades-long tradition of developing innovative active vibration isolation solutions for the global semiconductor and metrology industries, Integrated Dynamics Engineering (IDE) is now highlighting its state-of-the-art series, ATAN - a hybrid suite of active vibration isolation modules. These have been engineered to accommodate a broad range of stage mass acceleration and payload capacities. 

    This new series of ATAN modules is yet another example of IDE’s dedication to providing extraordinary, highly flexible isolators that meet, or even exceed, the demands of today’s ever-expanding global OEM applications.

    The ATAN active vibration isolation solution incorporates a complex hybrid isolation technology which provides outstanding floor vibration control and an order of magnitude improvement for stage settling times. Typical settling performance achieved has been below 50 msec for today’s 2G + stages. 

    Currently, there are three size/capacity isolator options in the series: ATAN 500 - 2000 kg up to 6000 kg; ATAN 300 - 1000 kg up to 2500 kg; and ATAN 100 - 600 kg up to 1800 kg. 

    According to Roland Kappel, IDE Director of Environmental Product Development “Our new ATAN modules are a primary example of IDE never losing its focus on global semiconductor manufacturing. IDE continues to develop unique vibration isolation solutions that make optimum results readily achievable in fabs worldwide.”

  • Baladi
    Semi-active and full active vibration isolation solution...

  • Baladi supports mid-range and high-end semiconductor manufacturing equipment with their needs of high productivity, fast settling time and lowest vibration levels. The new Baladi product range closes that gap between classic passive air-spring isolation and state of the art active vibration isolation.
  • MK5
    EMI Active Compensation for SEM and TEM Microscopy...

  • • Most powerful and versatile field attenuation on the market (up to 55 dB)
    • Excellent dependability due to comprehensive performance diagnosis
    • Easy operation with sophisticated auto-tuning and touch screen control
    • Extensive adaptability for demanding applications and strong disturbances
    • Flexible sensor positioning due to compact design and large allowable field

 追加情報

初出展/New Exhibitor
No
新製品/New Products
Yes
製品展示/Displaying Equipment
No
デモンストレーション/ Product Demonstrations
No
産業・技術分野/ Industries/Technologies
LED/solid state lighting, MEMS, プラスチック/有機/プリンテッドエレクトロニクス/Plastic/organic/flexible electronics, パワー半導体/Power Semiconductors, 半導体/Semiconductor